Introducing a 384x288 pixel terahertz camera core

Chevalier, C.; Mercier, Luc; Duchesne, François; Gagnon, Lise; Tremblay, Bruno; Terroux, Marc; Généreux, Francis; Paultre, Jacques-Edmond; Provençal, Francis; Desroches, Yan; Marchese, Linda; Jerominek, Hubert; Alain, Christine; Bergeron, Alain

doi:10.1117/12.2002699

Cited by 10 publications

(4 citation statements)

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“…The three main components are the THz camera, the mm-wave source and optical components, such as off-axis parabolic mirrors (OAPs) and lenses made of either high-resistivity float zone (HRFZ) silicon or high-density polyethylene (HDPE) plastic. The THz imager used for these mm-wave reflection imaging tests was the INO IRXCAM-384-THz, shown in Figure 2 [6][7]. The camera's focal plane array (FPA) consists of 388 x 284 uncooled mircobolometric pixels with 35 μm pixel pitch.…”

Section: Mm-wave Imaging Systemmentioning

confidence: 99%

Reflection imaging in the millimeter-wave range using a video-rate terahertz camera

et al. 2016

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The ability of millimeter waves (1-10 mm, or 30-300 GHz) to penetrate through dense materials, such as leather, wool, wood and gyprock, and to also transmit over long distances due to low atmospheric absorption, makes them ideal for numerous applications, such as body scanning, building inspection and seeing in degraded visual environments. Current drawbacks of millimeter wave imaging systems are they use single detector or linear arrays that require scanning or the two dimensional arrays are bulky, often consisting of rather large antenna-couple focal plane arrays (FPAs).Previous work from INO has demonstrated the capability of its compact lightweight camera, based on a 384 x 288 microbolometer pixel FPA with custom optics for active video-rate imaging at wavelengths of 118 µm (2.54 THz), 432 µm (0.69 THz), 663 µm (0.45 THz), and 750 µm (0.4 THz). Most of the work focused on transmission imaging, as a first step, but some preliminary demonstrations of reflection imaging at these were also reported. In addition, previous work also showed that the broadband FPA remains sensitive to wavelengths at least up to 3.2 mm (94 GHz). The work presented here demonstrates the ability of the INO terahertz camera for reflection imaging at millimeter wavelengths. Snapshots taken at video rates of objects show the excellent quality of the images. In addition, a description of the imaging system that includes the terahertz camera and different millimeter sources is provided.

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Section: Mm-wave Imaging Systemmentioning

confidence: 99%

Reflection imaging in the millimeter-wave range using a video-rate terahertz camera

et al. 2016

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“…INO has been active in the development of customized uncooled bolometers for more than 20 years [1][2][3][4][5][6] . Various applications were targeted, including space applications where linear and 2D arrays were fabricated for Earth observation [3][4][5] .…”

Section: Introductionmentioning

confidence: 99%

On the figure of merit of uncooled bolometers fabricated at INO

Généreux

Tremblay

Girard

et al. 2016

Infrared Technology and Applications XLII

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This paper reports the NETD values of various uncooled bolometers fabricated at INO. They are measured using an external readout circuit that emulates the readout scheme of a commercial ROIC. The measured NETD values range between 6 and 75 mK, depending on the pixel pitch and response time. Pixel pitches of 12, 17 and 35 µm are considered. The figure of merit of the characterized detectors is below 350 mK*ms.

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“…Numerous custom uncooled Focal Plan Arrays (FPAs) have been developed for both space and commercial applications. Examples of prototypes that were developed include 128x128 (52 µm) 1 , 160x120 (52 µm) 2 , 256x1 (52 µm) 3 , 512x3 (39 µm) 4 , EarthCARE BBR (100 µm) 5 and 384x288 (35 µm) 6 arrays. More recently INO has, in the course of the ESA's GSTP5 program, developed 17 µm bolometers for a megapixel array (see Figure 1).…”

Section: Introductionmentioning

confidence: 99%

Vanadium oxide thin film with improved sheet resistance uniformity

et al. 2014

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This paper reports on the deposition of vanadium oxide thin films with sheet resistance uniformity better than 2.5% over a 150 mm wafer. The resistance uniformity within the array is estimated to be less than 1%, which is comparable with the value reported for amorphous silicon-based microbolometer arrays. In addition, this paper also shows that the resistivity of vanadium oxide, like amorphous silicon, can be modeled by Arrhenius' equation. This result is expected to significantly ease the computation of the correction table required for TEC-less operation of VO x -based microbolometer arrays.

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Introducing a 384x288 pixel terahertz camera core

Cited by 10 publications

References 0 publications

Reflection imaging in the millimeter-wave range using a video-rate terahertz camera

Reflection imaging in the millimeter-wave range using a video-rate terahertz camera

On the figure of merit of uncooled bolometers fabricated at INO

Vanadium oxide thin film with improved sheet resistance uniformity

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