Intraoperative Scanning Laser Doppler Interferometry

Huber, A.; Linder, T.; Ferrazzini, Mattia; Schmid, St.; Dillier, Norbert; Fisch, Ugo

doi:10.1142/9789812793980_0002

Cited by 2 publications

(1 citation statement)

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“…That means that we can reach deformations of up to 22.8 nm with a typical excitation source of around 3 V. Such deflections are in the range of 80-dB SPL [34], which let us conduct, in the future, further testing on force loading under human hearing field conditions. Furthermore, in vivo tests using laser Doppler interferometer carried out by Huber et al showed that stapes can reach lower values between 2 and 10 nm for the same signal level [39]. A fully functional prosthesis application would require external processing circuits and voltage clampers to get higher excitation voltages, maybe provided by more than one battery.…”

Section: Discussion On Audio Prosthesis Applicationsmentioning

confidence: 99%

Thin-Film Piezoelectric MEMS Transducer Suitable for Middle-Ear Audio Prostheses

Campanella

Camargo

Garcia

et al. 2012

J. Microelectromech. Syst.

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We report a thin-film piezoelectric microelectromechanical systems (MEMS) transducer suitable for in vivo implantation as audio prosthesis and a method for fabricating it. The transducer consists of a layered stack of thin films comprising a MEMS membrane made of an isolating oxide interface; two platinum (Pt) layers acting as electrodes, electrical paths, and contacting pads; a thin-film sputtered aluminum nitride (AlN) layer acting as acoustic active material of the transducer; a passivation layer for device protection; and a 3-D micromachined acoustic cavity fabricated on the bulk of a silicon-on-insulator supporting substrate. The transducer has a reduced size and a low cost associated with CMOS-like mass production. Finite-element modeling and experimental tests conducted at the audio and ultrasonic bands show that the device has the performance required in audio prosthesis applications. The technology offers possibilities for biocompatibility or biocompatible packaging and is integrable to microelectronic circuit technologies.[ 2012-0004]Index Terms-Aluminum nitride (AlN) devices and transducers, implantable audio prostheses, microelectromechanical systems (MEMS) transducer, piezoelectric transducers.

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Section: Discussion On Audio Prosthesis Applicationsmentioning

confidence: 99%