1997
DOI: 10.1063/1.120026
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Interstitial copper-related center in n-type silicon

Abstract: n-type silicon samples were measured by deep level transient spectroscopy (DLTS) immediately (within one hour of storage at room temperature, required for the preparation of Schottky-diodes) after copper diffusion and quench. A donor level at Ec-(0.15±0.01) eV with a concentration of up to 1013 cm−3 was detected. The amplitude of the DLTS peak decreased with the time of storage at room temperature, and stabilized at a concentration (4 to 7)×1011 cm−3 after 15–20 h. The activation energies and prefactors of the… Show more

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Cited by 69 publications
(56 citation statements)
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“…In other words, it has 'negative-U' and V +1 Si is energetically unstable. Only three levels are observed for substitutional copper Cu Si , corresponding to charge states +1, 0, −1, and −2 [5][6][7][8][9][10]. There is no experimental information about the defect's symmetry at present.…”
Section: Introductionmentioning
confidence: 99%
“…In other words, it has 'negative-U' and V +1 Si is energetically unstable. Only three levels are observed for substitutional copper Cu Si , corresponding to charge states +1, 0, −1, and −2 [5][6][7][8][9][10]. There is no experimental information about the defect's symmetry at present.…”
Section: Introductionmentioning
confidence: 99%
“…The electrical levels of various copper related defects are known from experiment. [2][3][4][5][6][7] Analysis and interpretation of the observations is assisted by the fact that related impurities and their complexes with hydrogen such as zinc, 8 silver, 9 gold, 10,11 platinum, 12 and palladium 13 have defect induced levels of similar character. According to Watkins, the electrical levels of substitutional transition metals are derived from those of the silicon monovacancy V Si ͑Ref.…”
Section: Introductionmentioning
confidence: 99%
“…Such small magnitude of the copper-related DLTS peak situated around 90 K [19] would not be detected on the background of the main DLTS-peak located around 110 K. The reason for the small amplitude of the broad maximum around 190 K related to Cu precipitates could be, as for Ni, the small ratio of Cu precipitate volume that hit inside the space charge region of schottky-diode.…”
Section: Discussionmentioning
confidence: 71%
“…According to the results of [19] the concentration of DLTS-signal due to interstitial Cu in n-Si www.pss-c.com…”
Section: Discussionmentioning
confidence: 97%