Abstract:For tantalum pentoxide capacitors in 1 Gbit dynamic random access memory, titanium nitride is adopted as the top electrode. After postannealing at temperatures higher than 750 °C, the capacitance of Ta2O5 reduces due to an interfacial reaction between TiN and Ta2O5. This was studied by high resolution electron microscopy and energy dispersive spectroscopy with a 1 nm electron probe. It is found that voids form along the interface between TiN and Ta2O5 and a large proportion of Ta dissolves into the TiN film. T… Show more
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