Interface fracture properties of thin films studied by using the micro-cantilever deflection technique

Matoy, Kurt; Detzel, Thomas; Müller, Matthias; Motz, Christian; Dehm, Gerhard

doi:10.1016/j.surfcoat.2009.09.013

Cited by 75 publications

(42 citation statements)

References 11 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Nanoindentation can be then utilized to perform cantilever deflection experiments [50] as shown in Fig.9. The energy release rate can be determined based on fracture mechanics [51], assuming that the bending stresses may be determined by a simple beam theory.…”

Section: Microcantilever Deflection Testsmentioning

confidence: 99%

See 1 more Smart Citation

Approaches to investigate delamination and interfacial toughness in coated systems: an overview

Chen¹,

Bull²

2010

J. Phys. D: Appl. Phys.

121

View full text Add to dashboard Cite

The fundamental property which often dictates the performance of a coating is its adhesion to the substrate and thus there are many techniques to measure adhesion. The choice of methods is dependent on many factors such as the mechanical properties of the coating and substrate, the interface properties, the microstructure of the coating/substrate system, residual stress, coating thickness and the intended application. Most tests aim to introduce a stable interfacial crack and make it propagate under controlled conditions and model this process to determine adhesion. The corresponding models are either stress analysis-based or energy-based. With the advent of miniature systems and very thin functional coatings, there is a need for characterization of adhesion at small length scales and some specific tests have been developed which are not appropriate for thicker coatings. Among these, indentation and scratch methods have the widest range of applicability but it is necessary to analyse the failure mechanisms before choosing an appropriate model to extract adhesion parameters. This paper reviews the main quantitative adhesion tests for coatings and highlights the tests which can be used to assess submicrometre coatings and thin films. The paper also highlights the modelling and analysis methods necessary to extract reliable adhesion properties illustrating this with examples for submicrometre coatings on silicon and architectural glass.

show abstract

Section: Microcantilever Deflection Testsmentioning

confidence: 99%

“…This technique has been successfully applied to determine the interfacial toughness of SiO 2 /metal coatings on a Si(100) substrate which yields an energy release rate of 0.7 to 4.8 J/m 2 [50] This method is very sensitive to the initial defect size and the sample preparation is tedious.…”

Section: Microcantilever Deflection Testsmentioning

confidence: 99%

Approaches to investigate delamination and interfacial toughness in coated systems: an overview

Chen¹,

Bull²

2010

J. Phys. D: Appl. Phys.

121

View full text Add to dashboard Cite

show abstract

“…Matoy et al [29], Hirakata et al [30], and Chan et al [31], used notched MC configurations to initiate delamination of SiO/W and SiO/Cu, Sn/Si, and Zr/hydride interfaces, respectively. Delamination generally occurred in an unstable manner due to the interfaces being orientated perpendicular to the axis of the MCs; prompting the development of alternative configurations [32].…”

Section: Introductionmentioning

confidence: 99%

Inducing stable interfacial delamination in a multilayer system by four-point bending of microbridges

Mead

Huang

2017

Surface and Coatings Technology

View full text Add to dashboard Cite

The ability to produce stable delamination of thin film multilayer interfaces is a powerful tool for studying the interfacial adhesion within microsystems. In this study, a technique involving the four-point bending of microbridges was applied to initiate stable interfacial delamination within a multilayer system. Microscale pre-notched bridges with clamped-ends were machined into an Al/SiN/GaAs multilayer using focus ion beam milling. A square flat-end indenter was used to induce bending of the bridge by two contact locations. Bridge failure occurred via substrate fracture at the pre-notch, followed by crack deflection, and stable interfacial delamination of the SiN/GaAs interface. Substrate fracture and delamination were identified within the obtained load-displacement curves as a pop-in and region of linear load reduction respectively.

show abstract

“…New approaches to study the adhesion behavior of atomic layer deposited thin films include shaft-loading blister testing 9 and scanning nanowear. 8 Matoy et al studied interface fracture properties of silicon oxide and metallic thin films by deflecting microcantilevers fabricated by focused ion beam machining 10 that has similar test geometry as our embedded microsphere test structure.…”

Section: Introductionmentioning

confidence: 99%

Adhesion testing of atomic layer deposited TiO2 on glass substrate by the use of embedded SiO2 microspheres

Lyytinen

Berdova

Franssila

et al. 2013

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

View full text Add to dashboard Cite

Articles you may be interested inIn this paper, the authors present a new adhesion test method, which is under development, to study the interfacial mechanical parameters of atomic layer deposited (ALD) thin films. A highly sensitive lateral force adhesion testing tool was used to measure the lateral detaching force of 8 lm diameter SiO 2 microspheres embedded in 100 nm ALD TiO 2 thin film grown in 200 C. The resulting holes in the coating were characterized with scanning electron microscope plus energy dispersive x-ray spectroscopy and the delaminated areas were measured with image analysis software. The corresponding detaching force (F) was compared to the delaminated area (A) to calculate the critical stress value (r), which relates to the mechanical adhesion of the coating and also includes the effect of other influencing factors such as the film cohesion. The measured critical stress (r) of the ALD TiO 2 coating on a glass substrate was 36 6 12 MPa based on the measurement of 43 microspheres.

show abstract

Interface fracture properties of thin films studied by using the micro-cantilever deflection technique

Cited by 75 publications

References 11 publications

Approaches to investigate delamination and interfacial toughness in coated systems: an overview

Approaches to investigate delamination and interfacial toughness in coated systems: an overview

Inducing stable interfacial delamination in a multilayer system by four-point bending of microbridges

Adhesion testing of atomic layer deposited TiO2 on glass substrate by the use of embedded SiO2 microspheres

Contact Info

Product

Resources

About