Interdigitated array 3D micromesh electrodes for electrochemical sensors

Abstract

This paper describes the fabrication method of an interdigitated array 3D micromesh metal structure for electrochemical sensing electrodes. The inverse-micromesh structure formed by double backside exposure of the thick positive photoresist was utilized as a mold for electroplating. Ring-shaped Au patterns laid open by overexposure of the positive photoresist were employed as a seed layer for electroplating. An electrochemical sensor with interdigitated array 3D micromesh electrodes was realized by using the combination of the double-sided Cr pattern and protecting the resist layer to achieve selective electroplating. The diameter of the inclined micropillars was about 5 µm. The height and length of the micromeshes were 20 µm and 480 µm, respectively. The gap between the micromesh electrodes was 28 µm. The number of micromesh electrodes was 68 (34 anode and 34 cathode electrodes). The performance of the interdigitated array 3D micromesh electrochemical sensor was demonstrated using the redox reaction. The current signal measured by the 3D micromesh electrodes was 7.9 times higher than that of conventional planar electrodes.

Micro/Nano Fabrication Technologies and Micro Flow Devices for Future Energy Devices

“…The fabrication methods of the 3-D micromesh Ni structures were developed by modifying the multi-angle exposure of UV photpresist [11][12][13]. An inverse-micromesh frame was fabricated by multiple inclined backside exposures, and Ni was electroplated using the inverse-micromesh frame as a mold (Fig.…”

Fabrication of Catalyst-Functionalized Three-Dimensional Micromesh Structures

“…Various applications of 3-D micromesh structures have been reported, such as microfilters, 1,2) for the fragmentation of a droplet 3) and in highly sensitive electrochemical sensors. 4) In chemical/biochemical microsystems, catalysts are useful materials for enhancing the reaction efficiency. In conventional catalytic microreactors, catalysts such as Pt particles are deposited on the bottom and/or side walls of the microchannel.…”

Driving microfluidic flows with three dimensional electrodes.

“…Three dimensional structures are used as micro electrodes for many applications including, electrochemical sensing and detection( [20], [21], [22] and [23]),Li-ion microbatteries [24], neuroscience( [25], [26] and [27]) and lab-on-a chip applications, i.e. cell manipulation( [28], [29]) and cell separation( [30], [31] and [32]).…”