Fabrication of Catalyst-Functionalized Three-Dimensional Micromesh Structures

Keino, Satoshi; Sato, Hiroki; Homma, Takayuki; Shoji, Shuichi

doi:10.1143/jjap.47.5204

Cited by 2 publications

(2 citation statements)

References 8 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The vertical porous membrane with a height over 50 μm is for catching cellular tissues. Keino et al 3 reported functional 3D micromesh including titanium dioxide (TiO 2 ) microparticles. This 3D micromesh is for microreactors increasing the surface area for the reaction efficiency.…”

Section: Introductionmentioning

confidence: 99%

Patterning vertical sidewall for optical assembly

Yamamoto

Kubo

Kumagai

et al. 2021

J. Optical Microsystems

View full text Add to dashboard Cite

We report two approaches of the fabrication techniques for three-dimensional patterning across vertical sidewalls based on the photolithography. One approach applies the techniques of spray coating the photoresist and the angled exposure. The supposed application is the microenergy source summing the voltage of silicon (Si) photo cells. Since Si photo cell islands on the buried oxide are isolated from each other, the output voltage is summed well without interacting with the common substrate. Wiring using the vertical sidewalls minimizes the shadow region caused by the metal electrode. Another approach introduces a new sheet, which consists of polyvinyl alcohol (PVA) and polyethylene terephthalate layers. The photoresist film is spin-coated and pasted on the substrate making the bridge over the trench. The pattern of the cantilever overhanging the trench is transferred. Then, PVA is dissolved in water and the resist is developed. When the rinse water dries, the cantilever bends and adheres on the vertical sidewall. The minimum pattern width designed is 10 μm and is obtained on the vertical sidewall. © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

show abstract

Section: Introductionmentioning

confidence: 99%

Patterning vertical sidewall for optical assembly

Yamamoto

Kubo

Kumagai

et al. 2021

J. Optical Microsystems

View full text Add to dashboard Cite

show abstract

“…The SU-8 microenclosure array was fabricated by photolithography with exposure from the back of the photomask with collimated UV light. 26) From these experiments, we found that cells can be collected without a microchannel system and can be isolated into the microenclosure array placed in the vessel by vertical vibration induced by tapping.…”

mentioning

confidence: 97%

Microchannel-free collection and single-cell isolation of yeast cells in a suspension using liquid standing wave

Matsutani

Takada

2016

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

We demonstrate a microchannel-free collection method at nodes of liquid standing waves by the vertical vibration of a suspension including yeast cells. The pattern formation of the collection of cells using standing waves in a suspension was investigated by varying the frequency and waveform of vibrations. The single-cell isolation of yeast cells was achieved using a microenclosure array set at the nodes. In addition, we succeeded in the microchannel-free collection of yeast cells in a suspension, where patterns were formed by tapping vibration. The proposed technique is very simple and we believe that it will be useful for single-cell analysis and investigation.

show abstract

Fabrication of Catalyst-Functionalized Three-Dimensional Micromesh Structures

Cited by 2 publications

References 8 publications

Patterning vertical sidewall for optical assembly

Patterning vertical sidewall for optical assembly

Microchannel-free collection and single-cell isolation of yeast cells in a suspension using liquid standing wave

Contact Info

Product

Resources

About