High quality YBa2Cu3O7−δ (YBCO) films have been epitaxially grown on low dielectric constant, low loss tangent (001)MgF2 substrates using a double buffer layer scheme. The YBCO films are (001) oriented, exhibit Tc’s of 88–89 K with transition widths ≤0.5 K and Jc’s of 4×106 A/cm2 at 77 K in zero field. Dielectric resonator experiments indicate unloaded Q values in excess of 30 000 at 77 K and 24 GHz in the unpatterned films. Films patterned into meanderline resonators and operating at 10 GHz, 79 K, exhibit surface resistance (Rs)<1 m Ω suggesting near-future realization of low loss superconducting components in the millimeter-wave region.