1991
DOI: 10.1063/1.459732
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Interaction of silicon cluster ions with ammonia: Annealing, equilibria, high temperature kinetics, and saturation studies

Abstract: Interaction of silicon cluster ions with ammonia: The kinetics J. Chem. Phys. 93, 5709 (1990); 10.1063/1.459565Photothermal reflectance investigation of processed silicon. I. Roomtemperature study of the induced damage and of the annealing kinetics of defects in ionimplanted wafers

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Cited by 63 publications
(23 citation statements)
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“…We have investigated the structures and chemical properties of the clusters Si n and Ge n using this method [51 to 58]. The results are in good agreement with the related experiments [59,60].…”
Section: Methodssupporting
confidence: 76%
“…We have investigated the structures and chemical properties of the clusters Si n and Ge n using this method [51 to 58]. The results are in good agreement with the related experiments [59,60].…”
Section: Methodssupporting
confidence: 76%
“…There have been a number of studies of metal cluster reactivity in the past, but these studies have mainly focused on the size-dependent variations in the reaction rates. [14][15][16][17][18][19][20][21][22][23][24] The studies reported here have more in common with surface reactive scattering studies, where a reagent beam impinges on a well-characterized surface. [25][26][27] In our studies we are able to vary the collision energy and the temperature of the cluster surface over wide ranges, investigating reactions on both the solid-like and liquid-like phases of the cluster.…”
Section: Introductionmentioning
confidence: 85%
“…The experimental approach used in these studies is exceedingly simple [2][3][4][5][6][7][8][9][10]. The cluster ions are made by pulsed laser vaporization.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…In order to determine whether annealing the clusters influences their reactivity with ammonia a series of experiments were performed in which the clusters were collisionally annealed by injecting them at high energies into the drift tube where they are first excited by collisions with the buffer gas and then, when their kinetic energy is thermalized, cooled by further collisions [8]. Some typical results for Si25 are shown in Fig.…”
Section: So = K~mentioning
confidence: 99%