2018
DOI: 10.1007/s10853-018-3066-x
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Inter-diffusion of plasmonic metals and phase change materials

Abstract: This work investigates the diffusion of metal atoms into phase change chalcogenides, which is problematic because it can destroy resonances in photonic devices. Interfaces between Ge 2 Sb 2 Te 5 and metal layers were studied using X-ray reflectivity (XRR) and reflectometry of metal-Ge 2 Sb 2 Te 5 layered stacks. The diffusion of metal atoms influences the crystallisation temperature and optical properties of phase change materials. When Au, Ag, Al, W structures are directly deposited on Ge 2 Sb 2 Te 5 , inter-… Show more

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Cited by 49 publications
(39 citation statements)
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References 46 publications
(43 reference statements)
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“…Furthermore, the Au NPs may be replaced by Ag or Al NPs that are low in cost and compatible with CMOS technology . Clearly, diffusion barriers would be necessary …”
Section: Resultsmentioning
confidence: 99%
“…Furthermore, the Au NPs may be replaced by Ag or Al NPs that are low in cost and compatible with CMOS technology . Clearly, diffusion barriers would be necessary …”
Section: Resultsmentioning
confidence: 99%
“…PCMs have received a great deal of attention in the research area of active photonic devices . The main reason behind the selection of this multilayer combination is that many of the Ge 2 Sb 2 Te 5 (GST) tunable structures are not viable due to interdiffusion of noble metals with chalcogenides, when noble metals are in direct contact with chalcogenides . Unlink the PCM GST, Sb 2 S 3 has a bandgap of 2 eV, which renders it transmissive in the visible spectrum.…”
mentioning
confidence: 99%
“…By contrast, further reversible transition from the crystalline state to the amorphous state usually requires a short pulse of electric or optical energy, proper buffer and capping layers, which need to be considered in the design of metasurfaces. A recent study also shows the interdiffusion between metal atoms and GST. Therefore, barrier layers such as Si 3 N 4 or TiN are suggested to use when incorporating GST with plasmonic metasurfaces.…”
Section: Properties Of Phase‐change Chalcogenidesmentioning
confidence: 83%