Intelligent Robust Controller Design for a Micro-actuator

In this article the modeling aspects of an electrostatic microactuator with squeezed thin film damping effects are presented. The actuator is composed of a microcapacitor whose one plate is clamped on the ground while the other plate is floating on the air with the aid of an external supporting spring. Its highly nonlinear dynamic model is linearized at various operating points. Variations of the gap between the plates and the air pressure of the system are examined in order to find possible changes in the bifurcation points or other characteristics of the system. Significant conclusions for the case of the bifurcation point have been drawn and simulation studies substantiate the presented results.

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“…Figure 1 presents the structure of the µA. The dynamic nonlinear equation of the system [24], [25] is:…”

Section: Modeling Of Parallel Plate Actuators Withmentioning

confidence: 99%

Modeling and analysis of the squeezed film damping effect on electrostatic microactuators

Vagia

Tzes

2008

2008 16th Mediterranean Conference on Control and Automation

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“…Imposing an appropriate controller can help abstain from the undesired results of the pull-in phenomenon and improve nano-tweezers' efficiency. Previous researchers developed several linear and nonlinear controllers for microelectromechanical systems (MEMS) (Shang, 2017;Shirazi et al, 2011;Vagia et al, 2006Vagia et al, , 2008. By taking into account the finding field and deformation effect, Zhu et al (2008) developed a backstepping controller one-degree-of-freedom (1-DOF) parallel plate MEMS.…”

Section: Introductionmentioning

confidence: 99%

An improved fuzzy controller on electromechanical nano-tweezers

Koochi

Goharimanesh

Gharib

2022

Journal of Vibration and Control

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This paper aims to develop an improved fuzzy controller for position controlling of nano-wire-based electromechanical nano-tweezers. The nonlinear governing equation is developed by incorporating the Euler–Bernoulli beam model and Hamilton’s principle. Also, the quantum vacuum fluctuations are assimilated in the developed model in terms of Casimir attraction. The nonlinear constitutive equation is transformed into a nonlinear state-space form by employing the Galerkin method. Based on the linguistic explanation of the system, an improved fuzzy controller is designed to control the nano-tweezers for manipulating desired objects. The Taguchi technique has been used to decrease the number of independent experiments and improve the structure of membership functions, consequently. The designed controller is employed for both controlling and path tracking of nano-tweezers. The outcomes indicate that the proposed improved fuzzy controller has excellent performance for stabilizing the nano-tweezers at any desired gap.

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“…They neglect the fringing field effect and design a multi-parameter H ∞ controller to control the displacement of micro-actuator. Vagia et al, 16 from 2006 to 2013, developed numerous controllers for controlling the deflection of electromechanical micro-actuators, including, intelligent robust controller, robust proportional–integral–derivative (PID), 17 and robust adaptive. 18 A linear parameter-varying methodology is employed for controlling an electrostatic micro-actuator in Shirazi et al 12 Recently, some researchers focus on the suppression of vibration and position control of the MEMS to increase their performances.…”

Section: Introductionmentioning

confidence: 99%

Path tracking control of electromechanical micro-positioner by considering control effort of the system

Gharib

Koochi

Ghorbani

2020

Proceedings of the Institution of Mechanical Engineers, Part I:

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Position controlling with less overshoot and control effort is a fundamental issue in the design and application of micro-actuators such as micro-positioner. Also, tracking a considered path is very crucial for some particular applications of micro-actuators such as surgeon robots. Herein, a proportional–integral–derivative controller is designed using a feedback linearization technique for path tracking control of a cantilever electromechanical micro-positioner. The micro-positioner is simulated based on a 1-degree-of-freedom lumped-parameter model. Three different paths are considered, and the capability of the designed controller on the path tracking with lower error and control effort is investigated. The obtained results demonstrate the efficiency of the designed proportional–integral–derivative controller not only for reducing the tracking error but also for decreasing the control effort.

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Intelligent Robust Controller Design for a Micro-actuator

Cited by 21 publications

References 28 publications

Modeling and analysis of the squeezed film damping effect on electrostatic microactuators

Modeling and analysis of the squeezed film damping effect on electrostatic microactuators

An improved fuzzy controller on electromechanical nano-tweezers

Path tracking control of electromechanical micro-positioner by considering control effort of the system

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