2012
DOI: 10.1109/tuffc.2012.2513
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Intelligent nonsingular terminal sliding-mode control using MIMO elman neural network for piezo-flexural nanopositioning stage

Abstract: The objective of this study is to develop an intelligent nonsingular terminal sliding-mode control (INTSMC) system using an Elman neural network (ENN) for the threedimensional motion control of a piezo-flexural nanopositioning stage (PFNS). First, the dynamic model of the PFNS is derived in detail. Then, to achieve robust, accurate trajectory-tracking performance, a nonsingular terminal sliding-mode control (NTSMC) system is proposed for the tracking of the reference contours. The steady-state response of the … Show more

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Cited by 26 publications
(1 citation statement)
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“…To solve these problems and to obtain finite time convergence and higher control precision, terminal SMC (TSMC) is proposed in [14]. This solution itself possesses two disadvantages [15]: 1) singularity point and 2) the requirement of the bound of the uncertainty. Therefore, extra solutions such as nonsingular TSMC (NTSMC) [16] and uncertainty estimator [17] are required.…”
Section: Introductionmentioning
confidence: 99%
“…To solve these problems and to obtain finite time convergence and higher control precision, terminal SMC (TSMC) is proposed in [14]. This solution itself possesses two disadvantages [15]: 1) singularity point and 2) the requirement of the bound of the uncertainty. Therefore, extra solutions such as nonsingular TSMC (NTSMC) [16] and uncertainty estimator [17] are required.…”
Section: Introductionmentioning
confidence: 99%