Integration of sensors and GaAs electronic circuits on a single chip

Choi, Jeong Ryeol; Park, Sekwang

doi:10.1016/s0957-4158(98)00014-2

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“…Among them, GaAs is an attractive substrate material for development of optical devices based on AZO. This is attributed to the possibility of high level of monolithic system through the integration of optical components [18]. In addition, GaAs can work as source of As dopant to produce p-type ZnO [19].…”

Section: Introductionmentioning

confidence: 99%

Comparative study of structural and visible luminescence properties of AZO thin film deposited on GaAs and porous GaAs substrates

Naddaf

2015

Vacuum

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Section: Introductionmentioning

confidence: 99%

Comparative study of structural and visible luminescence properties of AZO thin film deposited on GaAs and porous GaAs substrates

Naddaf

2015

Vacuum

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Effects of As Doping on Properties of ZnO Films

et al. 2001

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A series of ZnO thin films with various deposition temperatures were prepared on (100) GaAs substrates by radio-frequency magnetron sputtering using ZnO target. The ZnO films were studied by field emission scanning electron microscope(FESEM), x-ray diffraction(XRD), photoluminescence(PL), cathodoluminescence(CL), and Hall measurements. The structural, optical, and electrical properties of the films were discussed as a function of the deposition temperature. With increasing temperature, the compressive stress in the films was released and their crystalline and optical properties were improved. From the depth profile of As measured by secondary ion mass spectrometry(SIMS), As doping was confirmed, and, in order to activate As dopant atoms, post-annealing treatment was performed. After annealing treatment, electrical and optical properties of the films were changed.

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Integration of sensors and GaAs electronic circuits on a single chip

Cited by 2 publications

References 8 publications

Comparative study of structural and visible luminescence properties of AZO thin film deposited on GaAs and porous GaAs substrates

Comparative study of structural and visible luminescence properties of AZO thin film deposited on GaAs and porous GaAs substrates

Effects of As Doping on Properties of ZnO Films

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