2021
DOI: 10.3390/coatings11111332
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Integration of Fluorescent, NV-Rich Nanodiamond Particles with AFM Cantilevers by Focused Ion Beam for Hybrid Optical and Micromechanical Devices

Abstract: In this paper, a novel fabrication technology of atomic force microscopy (AFM) probes integrating cantilever tips with an NV-rich diamond particle is presented. Nanomanipulation techniques combined with the focused electron beam-induced deposition (FEBID) procedure were applied to position the NV-rich diamond particle on an AFM cantilever tip. Ultrasonic treatment of nanodiamond suspension was applied to reduce the size of diamond particles for proper geometry and symmetry. The fabricated AFM probes were teste… Show more

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Cited by 7 publications
(6 citation statements)
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“…The ODMR signals were simultaneously imaged from all fluorescent diamond spots over the entire FOV of the objective in one exposure shot. Such wide-field imaging is faster and more efficient than confocal scanning using an NV probe on an AFM 24 , which typically requires hours of measurement time to scan the entire sample area.…”
Section: Resultsmentioning
confidence: 99%
“…The ODMR signals were simultaneously imaged from all fluorescent diamond spots over the entire FOV of the objective in one exposure shot. Such wide-field imaging is faster and more efficient than confocal scanning using an NV probe on an AFM 24 , which typically requires hours of measurement time to scan the entire sample area.…”
Section: Resultsmentioning
confidence: 99%
“…The ODMR signals were simultaneously imaged from all the fluorescent diamond spots over the entire field of view of the objective in one shot. Such wide-field imaging is considered to be faster and more efficient than confocal scanning using an NV probe on an AFM [26], which typically requires hours of measurement time to scan the whole sample area.…”
Section: Wide-field Odmr Imagingmentioning
confidence: 99%
“…Previously, NV centers have been prepared on various semiconductor and insulating substrates in the form of cantilevers 16 , microcavities 17 , and polymer membranes 18 . Such HNQ devices fabricated on diamonds and silicon surfaces have the advantages of being lightweight, and highly responsive to changes in the local environment.…”
Section: Introductionmentioning
confidence: 99%