Integration of a nonmetallic electrostatic precipitator and a wet scrubber for improved removal of particles and corrosive gas cleaning in semiconductor manufacturing industries

Submicrometer particle removal indoors by a novel electrostatic precipitator with high clean air delivery rate, low ozone emissions, and carbon fiber ionizer

“…The theoretical CADRs of the ESP air cleaner for these particles were compared with CADRs measured in this study. To determine the theoretical CADRs, we used Equation , and the theoretical single‐pass collection efficiency was calculated with the Deutsch model, which has been widely used in previous studies of the efficiency of two‐stage ESPs (e.g., Kim et al., , ; Yoo et al., ). The Deutsch efficiency formula is as follows:…”

“…Consequently, carbon fibers have been used as an alternative to avoid the corona discharge from thin metallic wires and spikes. In previous studies, we successfully developed an ESP with carbon fiber ionizers and nonmetallic collection plates for the treatment of fine and ultrafine particles and mists in corrosive gases released during the manufacture of semiconductors (Kim et al, 2010(Kim et al, , 2012. Park et al (2011) andNoh et al (2011) also developed air cleaners using fibrous and electret filters, which were electrostatically assisted by carbon fiber ionizers.…”

“…The fan was located at the outlet of the air cleaner, and its flow rate was controlled with an electrical inverter. Figure 2 shows the experimental setup for the single-pass collection efficiency test for particles in the size range from 0.25 to 0.35 lm, which includes the particle size, 0.3 lm, used as the Korean and Japanese test standard for air cleaners (JEMA, 1995;KACA, 2006), and is also the most penetrating particle size range for the ESP that measured in our previous study using particles with the size range from 0.03 to 10 lm (Kim et al, 2012). The test procedure used in this study was a Korean standard test method for an air cleaner, SPS-KACA-002-132 (KACA, 2006), which is very similar to that used in Japanese and American test methods, except test particle type and size range (AHAM, 2006;JEMA, 1995).…”

Honeycomb Wet Scrubber For Acidic Gas Control: Modeling And Long-term Test Results 

“…determining the optimal operating conditions [16,26,28], attempting to improve the performance of the existing WSs operating in high-tech industries [9,10,22], and designing lab-scale WSs for shortterm study only [13,19,29]. A WS packed with a multi-parallel-plate (MPP) module (PPWS) developed by our group can achieve very high removal efficiencies for HCl (> 99%), HNO3 (> 98%), and CH3COOH (> 99%) and very low pressure drop (23.5 Pa) at a regulated residence time of 0.5 s, a low inlet concentration (< 3 ppmv), and a high L/G ratio (18.5 L m -3 ) [11].…”

“…The removal efficiencies of acidic gases were found to increase when the packing material size decreased [21]. For instance, the removal efficiency for HCl was increased by 2.0-3.5% when the specific surface area of packing balls was increased from 150 to 224 m 2 m -3 [22]. The packing materials also need to resist fouling and corrosion, avoid particle clogging, and enhance water retention to minimize the pressure drop and maintenance cost for long-term use.…”