Abstract:A laboratory scale, 1.0 CMM wet scrubber packed with water-absorbing honeycomb material (HWS) with a very large geometric surface area of 480 m2 m-3 and a low pressure drop developed in our previous study was shown to achieve a very high removal efficiency for gaseous acidic gases but there were no long-term test data. In this study, the HWS scaled up to operate at 100 CMM flow rate was tested for removing mixed acidic gases at a semiconductor fab for a very long period of 3.5 years. Results showed that the re… Show more
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