Integrated silicon photodetector for lab-on-chip sensor platforms

Samusenko, A.; Pucker, G.; Gandolfi, Davide; Guider, R.; Ghulinyan, Mher; Ficorella, F.; Pavesi, L.

doi:10.1117/12.2178973

Cited by 5 publications

(4 citation statements)

References 10 publications

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“…In fact, the water absorption coefficient at these wavelengths is about 0.043 1/cm (0.19 dB/cm), which is three orders of magnitude lower than at 1550 nm [14]. Another motivation for investigating photonic circuits in the SW-NIR region comes from the fact that low-cost vertical-cavity surface-emitting lasers (VCSEL), emitting at around 850 nm, can be used as light sources [15] and silicon photodiodes as photodetectors [16]. Such integration of a light source, a detector and a sensor on the very same chip can permit the realization of tiny, robust and cheap optical biosensors, which do not require alignment of optical components and can give an important contribution towards the simplification of the development of compact LOC devices.…”

Section: Introductionmentioning

confidence: 99%

A SiON Microring Resonator-Based Platform for Biosensing at 850 nm

Samusenko

Gandolfi²,

Pucker

et al. 2016

J. Lightwave Technol.

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In this paper we report on the design, fabrication and characterization of a photonic circuit for biosensing applications. Silicon oxynitride with a bulk refractive index of 1.66 is the core-layer material. The photonic circuit is optimized for a wavelength of ~850 nm, which allows on-chip integration of the light source via cost effective vertical-cavity surface-emitting lasers and of the detector by using standard silicon photodetectors. Design as well as fabrication processes are explained in details. The best characteristics for the single optical components in the photonic circuit are: for single-mode channel waveguides with dimensions of 350 nm × 950 nm; propagation losses of 0.8 dB/cm; bending losses of 0.1 dB/90 0 -bend (radius of curvature 100 µm); 49/51 splitting ratio for 3-dB power splitters (directional couplers); quality factors up to 1.3×10 5 for microring resonators. Volumetric sensing yields a bulk sensitivity of 80 nm/RIU and a limit of detection of 3×10 -6 RIU. Therefore, SiONbased photonic circuits represent a reliable material platform for biosensing in the short-wave near infrared region.

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Section: Introductionmentioning

confidence: 99%

A SiON Microring Resonator-Based Platform for Biosensing at 850 nm

Samusenko

Gandolfi²,

Pucker

et al. 2016

J. Lightwave Technol.

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“…photonics is a technology platform with a complete toolbox of integrated components, like couplers, filters, modulators and detectors [2], which allows monolithic fabrication of optical systems such as integrated biochemical sensors. Although there are still challenges to be addressed in the integration of the light source, limiting the number of fully integrated devices currently available [3], [4], this platform allows to achieve high production volumes at a very low cost per chip, making it affordable to dispose the devices after one or a few measurements, enabling a variety of lab-on-chip (LOC) point-of-care applications.…”

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confidence: 99%

“…In this paper we present an integrated photonic circuit for refractive index measurement and biochemical sensing consisting of a balanced Mach-Zehnder interferometer and an active phase detection technique based on phase generated carrier (PGC) demodulation. This method allows univocal determination of the phase variations without sensitivity fading, requiring only a fixed laser and a photodetector, which could potentially be integrated on chip [2], resulting in a low-cost, robust interrogation system for point-of-care applications. This paper is a more in-depth work with respect to the recent conference publication [14].…”

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confidence: 99%

Silicon Photonic Biochemical Sensor on Chip Based on Interferometry and Phase-Generated-Carrier Demodulation

Marin

Toccafondo

Velha

et al. 2019

IEEE J. Select. Topics Quantum Electron.

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Integrated biochemical sensors based on Mach-Zehnder interferometers (MZIs) rely on the evanescent field detection principle to monitor the phase shift induced by a refractive index change on the surface of the sensing arm, providing a high sensitivity thanks to the long interaction length with the analyte. This paper presents an integrated refractive index and biochemical sensor based on a pair of balanced MZIs realized on silicon-on-insulator. The device includes a thermal phase modulator in one of the branches of each MZI to extract univocally the induced phase change by applying active phase detection based on the phase generated carrier technique. The direct modulation of the MZI results in a simple configuration of the sensor, only requiring a fixed wavelength laser and a photodetector, enabling the possibility of full monolithic integration. The results of refractive index measurements show a detection limit down to 4.88 × 10-7 RIU. Additionally, an immunoassay reports the binding of anti-bovine serum albumin (BSA) to BSA, with anti-BSA concentrations down to 33.33 nM. Index Terms-Optical sensors, chemical and biological sensors, photonic integrated circuits, interferometry, phase modulation. I. INTRODUCTION I N THE past decades, there has been a growing interest in integrated photonic biochemical sensors for a wide range of applications, such as clinical diagnosis, food safety and chemical and biological warfare surveillance [1]. In particular, silicon

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“…The design (see Figure 1) implements ringresonator sensors and lateral polycrystalline-silicon p-i-n detectors, both of which are monolithically integrated on top of the output waveguides using CMOS technology. 5 Low-cost singlemode VCSEL diodes are used as the light source. 6 Directional couplers split the light equally into four sensing sites.…”

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confidence: 99%