An integrated optical biosensor platform

Pucker, G.; Samusenko, A.; Ghulinyan, Mher; Pasquardini, Laura; Chalyan, Tatevik; Guider, R.; Gandolfi, Davide; Adami, Andrea; Lorenzelli, Leandro; Pavesi, L.

doi:10.1117/2.1201602.006292

Cited by 2 publications

(2 citation statements)

References 7 publications

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“…Compact device footprints and an ability to leverage the same manufacturing techniques employed in the semiconductor industry are strong incentives both for systems designers and in applications where low cost is necessary. Label-free biosensors, optical interconnects for computers and datacenters, integrated lasers with III-V gain media, and phased arrays consisting of thousands of elements have all been demonstrated using the same basic silicon photonic technology 1,[5][6][7][8] . However, with a bandgap at 1.1 um, silicon is unsuitable for applications which require visible or ultraviolet light, such as optogenetics 9,10 , protein sensing 11,12 , and atom-based sensing, time-keeping, and information processing [13][14][15][16] .…”

Section: Introductionmentioning

confidence: 99%

Low-loss integrated photonics for the blue and ultraviolet regime

et al. 2019

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We present a low-loss integrated photonics platform in the visible and near ultraviolet regime. Fully-etched waveguides based on atomic layer deposition (ALD) of aluminum oxide operate in a single transverse mode with <3 dB/cm propagation loss at a wavelength of 371 nm. Ring resonators with intrinsic quality factors exceeding 470,000 are demonstrated at 405 nm, and the thermo optic coefficient of ALD aluminum oxide is estimated to be 2.75 × 10 −5 [RIU/ • C]. Absorption loss is sufficiently low to allow on-resonance operation with intracavity powers up to at least 12.5 mW, limited by available laser power. Experimental and simulated data indicates the propagation loss is dominated by sidewall roughness, suggesting lower loss in the blue and UV is achievable. I. INTRODUCTIONThe success of silicon photonics in telecommunications has lead to the application of nano-scale photonics in a variety of fields including computing, nonlinear optics, quantum information processing, and biochemical sensing 1-5 . Compact device footprints and an ability to leverage the same manufacturing techniques employed in the semiconductor industry are strong incentives both for systems designers and in applications where low cost is necessary. Label-free biosensors, optical interconnects for computers and datacenters, integrated lasers with III-V gain media, and phased arrays consisting of thousands of elements have all been demonstrated using the same basic silicon photonic technology 1,5-8 . However, with a bandgap at 1.1 um, silicon is unsuitable for applications which require visible or ultraviolet light, such as optogenetics 9,10 , protein sensing 11,12 , and atom-based sensing, time-keeping, and information processing [13][14][15][16] . A straightforward way of bypassing this limitation is to use silicon nitride, commonly integrated alongside silicon, which has transparency into the visible. Waveguide platforms based on silicon nitride are quite mature, particularly for red and near infrared (NIR) wavelengths. Less progress has been made for devices operating in the blue and near ultraviolet (UV, NUV). This is predominantly due to the high material absorption (>20 dB/cm) that begins in the low 400 nm wavelength range 17 .The most common alternative to silicon nitride for ultraviolet photonics are the III-V nitride materials, particularly aluminum nitride (AlN) and aluminum-gallium nitride alloys (AlGaN) 18 . AlN has a bandgap corresponding to λ ∼ 200 nm and exhibits second-order nonlinearities, making it attractive for integrated nonlinear optics and electrical tuning of reso-2 nant structures. Early demonstrations of ultraviolet waveguides in AlN suffered extremely high loss (389 dB/cm at a wavelength λ = 450 nm) due to a combination of bulk (polycrystalline) material loss and high sidewall roughness 19 . More recent work using nanocrystalline AlN has brought the loss coefficient down by an order of magnitude (∼50 dB/cm at λ = 405 nm) but in a regime where device size is restricted to sub-centimeter or sub-millimeter lengths when s...

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Section: Introductionmentioning

confidence: 99%

Low-loss integrated photonics for the blue and ultraviolet regime

et al. 2019

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“…Ring resonators integrated on silicon for sensing purposes have been demonstrated in a variety of materials including silicon [ 1 , 2 , 3 , 4 , 5 , 6 , 7 , 8 , 9 , 10 , 11 , 12 ], polymers [ 14 , 15 ], silicon oxynitride [ 16 ], and silicon nitride [ 17 , 18 , 19 ], which are the materials typically available in silicon photonics foundries. As silicon sensors begin to approach their fundamental limitations [ 5 ] new directions of research must be studied.…”

Section: Introductionmentioning

confidence: 99%

A Tellurium Oxide Microcavity Resonator Sensor Integrated On-Chip with a Silicon Waveguide

Frankis

Bonneville

Bradley

2018

Sensors

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We report on thermal and evanescent field sensing from a tellurium oxide optical microcavity resonator on a silicon photonics platform. The on-chip resonator structure is fabricated using silicon-photonics-compatible processing steps and consists of a silicon-on-insulator waveguide next to a circular trench that is coated in a tellurium oxide film. We characterize the device’s sensitivity by both changing the temperature and coating water over the chip and measuring the corresponding shift in the cavity resonance wavelength for different tellurium oxide film thicknesses. We obtain a thermal sensitivity of up to 47 pm/°C and a limit of detection of 2.2 × 10−3 RIU for a device with an evanescent field sensitivity of 10.6 nm/RIU. These results demonstrate a promising approach to integrating tellurium oxide and other novel microcavity materials into silicon microphotonic circuits for new sensing applications.

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An integrated optical biosensor platform

Abstract: A tiny, low-cost evanescent-field biosensor chip with a directly integrated optical detector enables carcinogenic contaminant detection and shows promise for point-of-use application.

Cited by 2 publications

References 7 publications

Low-loss integrated photonics for the blue and ultraviolet regime

Low-loss integrated photonics for the blue and ultraviolet regime

A Tellurium Oxide Microcavity Resonator Sensor Integrated On-Chip with a Silicon Waveguide

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