Integrated Readout and Control Electronics for a Microelectromechanical Angular Velocity Sensor

Saukoski, M.; Aaltonen, Lasse; Halonen, K.; Salo, T.

doi:10.1109/esscir.2006.307576

Cited by 17 publications

(13 citation statements)

References 12 publications

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“…This noise level compares favorably with other recently published gyroscopes [3,[21][22][23]. The presented design techniques are also fully compatible with mode-matching techniques such as in [23].A modified design that combines these techniques could achieve an even lower noise level.…”

Section: Gyroscope Characteristicssupporting

confidence: 66%

A Closed-Loop Digitally Controlled MEMS Gyroscope With Unconstrained Sigma-Delta Force-Feedback

et al. 2009

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In this paper we describe the system architecture and prototype measurements of a MEMS gyroscope system with a resolution of 0.025The architecture makes extensive use of control loops, which are mostly in the digital domain. For the primary mode both the amplitude and the resonance frequency are tracked and controlled. The secondary mode readout is based on unconstrained Σ∆ force-feedback, which does not require a compensation filter in the loop and thus allows more beneficial quantization noise shaping than prior designs of the same order. Due to the force-feedback, the gyroscope has ample dynamic range to correct the quadrature error in the digital domain. The largely digital set-up also gives a lot of flexibility in characterization and testing, where system identification techniques have been used to characterize the sensors. This way, a parasitic direct electrical coupling between actuation and readout of the mass-spring systems was estimated and corrected in the digital domain. Special care is also given to the capacitive readout circuit, which operates in continuous time.

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Section: Gyroscope Characteristicssupporting

confidence: 66%

A Closed-Loop Digitally Controlled MEMS Gyroscope With Unconstrained Sigma-Delta Force-Feedback

et al. 2009

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“…They consist of only a few analog components in order to minimize the noise contribution by each element. The main elements of the readout chain are a low noise continuous time capacitance to voltage converter [7] followed by a filter unit and a low-pass ΣΔ-ADC. Both readout chains are built up fully differentially.…”

Section: The Electronicsmentioning

confidence: 99%

Yet another tuning fork gyroscope

Forke

Hiller²,

Hahn³

et al. 2015

2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings

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This paper reports on the development of a micromechanical vibrating mass tuning fork gyroscope with coupled drive and sense modes. The mechanical structure has been designed to have a first anti-phase drive mode and a second anti-phase sense mode. The frequencies of all other modal modes are higher. The micromechanical structure is fabricated with a cavity SOI technology called BDRIE [1]. The analog ASIC for very low noise readout (< 50 nV/rtHz) is placed on the MEMS and is connected symmetrically with wire bonds. MEMS and ASIC have been co-designed to best fit physically and electrically to each other

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“…The high voltages are needed for example with memory circuits or with microstructures that use electrostatic coupling. In gyroscopes [1], for example, the detection of a small signal capacitance is needed and this yields for a clean distortion free supplies.…”

Section: Introductionmentioning

confidence: 99%

Charge-pump based frequency regulator for precision supply generation

Kalanti¹,

Yucetas²,

Salomaa³

et al. 2010

Proceedings of 2010 IEEE International Symposium on Circuits and Systems

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The attenuation of supply noise is crucial in those sensor interface circuits that require the detection of the small signal capacitance. This paper presents an integrated chargepump based continuous frequency regulator for precision supply voltage generation. The circuit is able to operate with external supply voltage ranging from 3.0 V to 5.5 V. The charge-pump generates a nominal voltage of 3.6 V and is able to operate with 1.3 mA and 2.5 mA load currents while the minimum input noise attenuation is around 53 dB. The output noise of the system is 91.32 µVrms and the active area of the circuit is 0.18 mm 2 . The technology used for the implementation is 0.35 µm CMOS.

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Integrated Readout and Control Electronics for a Microelectromechanical Angular Velocity Sensor

Cited by 17 publications

References 12 publications

A Closed-Loop Digitally Controlled MEMS Gyroscope With Unconstrained Sigma-Delta Force-Feedback

A Closed-Loop Digitally Controlled MEMS Gyroscope With Unconstrained Sigma-Delta Force-Feedback

Yet another tuning fork gyroscope

Charge-pump based frequency regulator for precision supply generation

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