Integrated optical proximity microsensor

Esinenco, D.; Budianu, E.; Bineva, I.; Andrijasevic, D.; Manea, E.; Brenner, W.; Müller, Raluca

doi:10.1016/j.jlumin.2006.08.065

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“…1. Several types of photodetector structures like PIN, metal-semiconductor-metal, avalanche photodiodes can be used to detect the radiation coupled from optical waveguide, [1]. PIN type photodiodes have the advantage of a high reponsivity which confer to the sensor a good sensibility.…”

Section: Introductionmentioning

confidence: 99%

Linear photodetector arrays integrated with optical waveguides for proximity optical microsensor

Budianu

Müller

Eftime

et al. 2008

2008 International Semiconductor Conference

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Two linear photodetector arrays integrated with optical waveguide, designed as proximity/position optical microsensors are presented in this paper. Each of the two arrays consist in four silicon P + NN + photodiodes, fabricated in an epitaxial silicon layer using standard Si device fabrication techniques and are integrated with SU8 optical waveguides. The optoelectrical characterization of every one photodetector of the linear array was realized by vertical illumination with a red radiation and good results have been obtained.

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Section: Introductionmentioning

confidence: 99%