1996
DOI: 10.1016/s0925-4005(97)80066-4
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Integrated optical enlarged-field interferometer used as a chemical sensor

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Cited by 7 publications
(3 citation statements)
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“…Technologies employed for fabrication of these sensors are prevalently CMOS-compatible (guiding film in silicon, silicon nitride or silicon oxynitride) but glasses [18-19] and III-V semiconductor compounds [20] technologies have been also proposed.…”
Section: Integrated Optical Biosensorsmentioning
confidence: 99%
See 1 more Smart Citation
“…Technologies employed for fabrication of these sensors are prevalently CMOS-compatible (guiding film in silicon, silicon nitride or silicon oxynitride) but glasses [18-19] and III-V semiconductor compounds [20] technologies have been also proposed.…”
Section: Integrated Optical Biosensorsmentioning
confidence: 99%
“…In the last two decades, a great number of integrated optical sensors based on Mach-Zehnder interferometers (MZI) have been realized to detect different chemical species as organic compounds [ 13 - 14 ] and proteins [ 15 - 17 ]. Technologies employed for fabrication of these sensors are prevalently CMOS-compatible (guiding film in silicon, silicon nitride or silicon oxynitride) but glasses [ 18 - 19 ] and III-V semiconductor compounds [ 20 ] technologies have been also proposed.…”
Section: Integrated Optical Biosensorsmentioning
confidence: 99%
“…The electrical changes include piezoelectric frequency (26 ), impedance (27), capacitance (28), photoconductivity (29), dark dc conductivity (30) and various electrochemical phenomena (31). The optical changes include transmittance (22,25), fluorescence (18), surface plasmon resonance (31,32), interferometry (33) and chemiluminescence (34 ).…”
Section: Introductionmentioning
confidence: 99%