Integrated optical channel waveguides in silicon using SiGe alloys

Splett, A.; Schmidtchen, J.; Schueppert, Berndt; Petermann, K.

doi:10.1117/12.24472

Cited by 2 publications

(2 citation statements)

References 7 publications

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“…The investigation of Si photonic circuits started in the mid-1980s and has been ongoing since then. A significant volume of research has been conducted on various materials such as SiON [ 21 , 22 , 23 , 24 , 25 , 26 , 27 ], Si 3 N 4 [ 28 , 29 , 30 ], SiGe [ 31 , 32 , 33 , 34 ], SiO 2 [ 35 , 36 , 37 ], and SiC [ 38 , 39 , 40 ]. These materials have been explored concerning their compatibility with standard CMOS technology.…”

Section: Historymentioning

confidence: 99%

Breakthrough in Silicon Photonics Technology in Telecommunications, Biosensing, and Gas Sensing

Shahbaz,

Butt,

Piramidowicz

2023

Micromachines

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Silicon photonics has been an area of active research and development. Researchers have been working on enhancing the integration density and intricacy of silicon photonic circuits. This involves the development of advanced fabrication techniques and novel designs to enable more functionalities on a single chip, leading to higher performance and more efficient systems. In this review, we aim to provide a brief overview of the recent advancements in silicon photonic devices employed for telecommunication and sensing (biosensing and gas sensing) applications.

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Section: Historymentioning

confidence: 99%

Breakthrough in Silicon Photonics Technology in Telecommunications, Biosensing, and Gas Sensing

Shahbaz,

Butt,

Piramidowicz

2023

Micromachines

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“…This paper discusses the early research on silicon photonics from the mid 1980's to the mid 1990s. Whilst a considerable amount of work had been carried in related materials (for example Si 3 N 4 [2][3][4][5], SiON [6][7][8][9][10][11][12][13][14], SiO 2 [15][16][17][18][19], SiGe [20][21][22][23][24], and SiC [25][26][27]) this paper focuses on single-crystal silicon devices and the ultimate goal of monolithic silicon integration. Whilst these other materials are compatible with standard CMOS technology, they potentially add complexity to the processing.…”

Section: Introductionmentioning

confidence: 99%

Silicon photonics: the early years

2005

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The purpose of this paper is to set the scene for what promises to be an outstanding conference. To this end the paper will survey the early work in silicon photonics from the late 1980s to the mid 1990s. This was when the more fundamental studies of basic building blocks were carried out, such as study of the silicon optical waveguide itself, the contributions to loss and improvement of waveguiding devices. Issues such as how to achieve modulation, and how to implement a modulator, the criteria for single mode propagation will also be covered, as well as work on the beginnings of optical circuits in silicon and SOI. The focus will be upon pure silicon, usually, but not exclusively in the form of Silicon on Insulator (SOI), as opposed to work on compounds such as SiGe or SiC. Much of this work still resonates with work being carried out today, because the move to smaller and more efficient devices means that some of these issues must be revisited in order to achieve optimal device performance. Hence the paper will provide a summary of the early work on silicon photonics, and attempt to relate it to some of the issues being studied today.

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Integrated optical channel waveguides in silicon using SiGe alloys

Cited by 2 publications

References 7 publications

Breakthrough in Silicon Photonics Technology in Telecommunications, Biosensing, and Gas Sensing

Breakthrough in Silicon Photonics Technology in Telecommunications, Biosensing, and Gas Sensing

Silicon photonics: the early years

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