Integrated micro-displacement sensor that measures tilting angle and linear movement of an external mirror

Ishikawa, I.; Sawada, Renshi; Higurashi, Eiji; Sanada, S.; Chino, D.

doi:10.1016/j.sna.2007.03.027

Cited by 48 publications

(18 citation statements)

References 8 publications

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“…Last but not least it can be used for quality control of the MOEMS mirrors. In several publications ( [1], [2], [3]) designs are presented from an experimental point of view. None of them discusses "best design" rules or the present errors of nonlinearity.…”

Section: Introductionmentioning

confidence: 99%

Theoretical aspects and derived design rules for optical angle position sensing of tilt mirrors

Baumgart

Tortschanoff

2012

2012 International Symposium on Optomechatronic Technologies (ISOT 2012)

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Tiltable mirrors, which can be produced in small form factors via MOEMS technology, are widely used for many applications. An independent, accurate and fast feedback of the angle position is demanded by industry. Simple optical tilt angle sensing layouts are analytically described. The concept is based on measuring tilt angle dependent intensity or intensity changes. The performance limits of each layout are evaluated and derived design rules for best linear behavior are given.

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Section: Introductionmentioning

confidence: 99%

Theoretical aspects and derived design rules for optical angle position sensing of tilt mirrors

Baumgart

Tortschanoff

2012

2012 International Symposium on Optomechatronic Technologies (ISOT 2012)

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“…One of the challenging issues for miniature FTS systems is the pressing demand to design a large-stroke electrothermal micromirror with a low-cost, integrated tilting sensing mechanism. To accomplish this, the photodiode-based tilting angle detector [23] and resonant inductive coupling position sensor [24] are two possible solutions. Further, considering that this LSF bimorph-based MEMS mirrors have large thermal response time (∼100 ms) which will limit the scan speed, our future work will focus on design, fabrication and control of a large-stroke electrothermal micromirror with faster thermal response [25].…”

Section: Discussionmentioning

confidence: 99%

Modeling and Control of a Large-Stroke Electrothermal MEMS Mirror for Fourier Transform Microspectrometers

Han

Wang

Zhang

et al. 2016

J. Microelectromech. Syst.

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A microelectromechanical systems (MEMS) mirror with large vertical displacement has been developed for Fourier transform microspectrometers, but there exists a large tilting during the large-stroke scanning of the MEMS mirror, which greatly compromises the usable range. In this paper, a closed-loop control method has been established to minimize the tilting of the MEMS mirror. According to experimental results, the tilting motion of the mirror plate can be modeled as a fourth-order system. A feedback controller consisting of a phase-lag compensator, a low-pass filter and a notch filter utilized to stabilize the closed-loop tilt system. A gain scheduling approach is also used to compensate the bias-dependent loop gain and thereby provide more consistent tilting rejection over a wide scan range. Compared with the open-loop drive approach, the closed-loop system offers a stable scan operation with much faster dynamic response and improved overall robustness. The experiments show that the residual tilting is reduced to below ±0.0015°during the full range scan of the MEMS mirror. With this control method, the MEMS mirror achieved a stable scan range up to 356.4 µm, so the measured spectral resolution reached 28 nm at 532 nm in a microspectrometer. The mirror tilting can be reduced dramatically by the proposed active control scheme, and thereby, the usable vertical scan range is increased significantly.[2016-0061]

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“…Mirror inspection via interference microscopy (Grigg et al 2004) is very precise but bulky and costly. Thus, intensity tracking setups, comprising a light source and a detector, are often used (Harel et al 2003;Ishikawa et al 2007;Hwu et al 2008;Agudelo et al 2009;Tortschanoff et al 2012). In these publications designs are presented from an experimental point of view.…”

Section: Introductionmentioning

confidence: 99%

Theoretical Aspects in the Design of Optical Angular Position Sensing of Tiltable Mirrors

Baumgart

Tortschanoff

2013

International Journal of Optomechatronics

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Tiltable mirrors, which can be produced in small form factors via MOEMS technology, are widely used for many applications. An independent, accurate and fast feedback of the angle position is demanded by industry. Simple optical tilt angle sensing layouts are analytically described. The concept is based on measuring tilt angle dependent intensity or intensity differences. The performance limits of each layout are evaluated and derived design rules for the best linear behavior are given.

show abstract

Integrated micro-displacement sensor that measures tilting angle and linear movement of an external mirror

Cited by 48 publications

References 8 publications

Theoretical aspects and derived design rules for optical angle position sensing of tilt mirrors

Theoretical aspects and derived design rules for optical angle position sensing of tilt mirrors

Modeling and Control of a Large-Stroke Electrothermal MEMS Mirror for Fourier Transform Microspectrometers

Theoretical Aspects in the Design of Optical Angular Position Sensing of Tiltable Mirrors

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