2011
DOI: 10.1109/tpel.2010.2102776
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Integrated LC Filter on Silicon for DC–DC Converter Applications

Abstract: The integration of passive components on silicon for future DC-DC converters applications is still a challenging area of research. This paper reports the microfabrication of a fully integrated filter containing a spiral inductor on top of a 3D capacitor. A thin magnetic shielding layer is introduced between the two components demonstrating that losses caused by the inductor in the capacitor area are reduced, thus increasing the maximum working frequency of the whole component. The fabricated filter was charact… Show more

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Cited by 39 publications
(21 citation statements)
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References 26 publications
(27 reference statements)
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“…For 3.7 V to 1.1 V ZVS power conversion with a current ripple ΔI L = 2 I O (boundary condition for ZVS), the inductor loss and efficiency of the TSECPI are compared with those of the previous reported monolithic approaches ([2], [6], [8], [9], [12]) as shown in Fig. 9.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…For 3.7 V to 1.1 V ZVS power conversion with a current ripple ΔI L = 2 I O (boundary condition for ZVS), the inductor loss and efficiency of the TSECPI are compared with those of the previous reported monolithic approaches ([2], [6], [8], [9], [12]) as shown in Fig. 9.…”
Section: Resultsmentioning
confidence: 99%
“…For integrated inductors with electroplated magnetic cores, the main loss mechanism is hysteresis loss and eddy current loss in the core material [6][7][8]. For integrated on-chip coreless inductor, the substrate eddy current loss is the dominant factor for large AC resistance and in turn causing large AC loss [2,9]. Reducing these losses requires complicated core lamination process [10] or complex substrate treatment [11].…”
Section: Introductionmentioning
confidence: 99%
“…As the size and volume directly influence the motional resistance of the device, the efficiency of the micro-resonator based converter is low compared to the existing works on PT based converters. Recently, many low power converters have been reported utilizing on chip air-core [73], [74] or co-packaged microfabricated air-core/thin magnetic film core inductors [75]- [77], [78] as well as co-packaged inductors on ferrite substrates [79]. These miniature (on-chip) converters may also be used as power conditioning circuits for implantable devices.…”
Section: Device Characterization and Performance Analysismentioning
confidence: 99%
“…The PCB material selected as the substrate material to integrate a high power-density converter is mainly because of its capability for high-volume production using standard lamination process. The use of wide-band gap power transistors switched at above 1 MHz with soft-switching topology is favorable to reduce the size of passive components and thus to make it possible to embed passives into PCB substrate [3], [4]. Two methods for fabrication of PCB embedded transformers have been reported in [5]- [7].…”
Section: Introductionmentioning
confidence: 99%