1992
DOI: 10.1109/66.175369
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Integrated circuit design for manufacturing through statistical simulation of process steps

Abstract: The methodology, implementation and results of a design for manufacturing (DFM) technique as applied to an integrated circuit boron base formation for an NPN transistor are presented. The primary purpose of the DFM technique is to achieve acceptable statistical prediction of the results by using the minimum number of variables and reducing the time required to perform physically-based simulations. Excellent statistical results are achieved while the number of simulations is reduced by at least a factor of five… Show more

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Cited by 28 publications
(2 citation statements)
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“…-1 a(z E, T)dz' G(z, E2 , 1) = a(z,E2 , T) • t e °( 13) ct0 Surface Photon Flux E Incident Photon Energy z position When E < Eg a1 (x, EA fl = a0 • where x is afunction ofz (14) (16) 2.3.7. Intrinsic Carrier Concentration [7] The intrinsic carrier concentration is expressed as a function of band gap, temperature, and material composition.…”
Section: Carrier Generations 151mentioning
confidence: 99%
“…-1 a(z E, T)dz' G(z, E2 , 1) = a(z,E2 , T) • t e °( 13) ct0 Surface Photon Flux E Incident Photon Energy z position When E < Eg a1 (x, EA fl = a0 • where x is afunction ofz (14) (16) 2.3.7. Intrinsic Carrier Concentration [7] The intrinsic carrier concentration is expressed as a function of band gap, temperature, and material composition.…”
Section: Carrier Generations 151mentioning
confidence: 99%
“…For this reason design of experiments (DoE) techniques are an effective approach for selecting the parameter settings for which the models should be run to make an appropriate comparison. "Experimental design consists of purposeful changes of the inputs to a process in order to observe the corresponding changes in the outputs" [5]. A designed experiment can also be thought of as a set of experiments, runs or trials designed to maximize information and minimize experimental effort.…”
Section: Introductionmentioning
confidence: 99%