Integrated Carbon Nanotube Array as Dry Adhesive for High‐Temperature Silicon Processing

Eun, Youngkee; Lee, Jae Ik; Choi, Jungwook; Song, Youngsup; Kim, Jongbaeg

doi:10.1002/adma.201102331

Cited by 26 publications

(19 citation statements)

References 26 publications

(29 reference statements)

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“…As a result, CNT forests can be produced on silicon and other high-temperature substrates, 8,9 non-horizontal surfaces, 4 and can be coated or infiltrated with other materials to form microstructured composites. 10,11 The three-dimensional geometry of CNT forests has also been exploited as a structural support for high aspect ratio micro structures, 11 a damping layer, 12 a high temperature dry adhesive material, 13 and was integrated into MEMS devices vertical comb-drive. 14 Moreover, CNT forests playing an instrumental role as an electrical component in several applications, for example, robust electrodes, 4 micro capacitors, 15 vertical comb-drive fingers, 14 and electrostatically actuated CNT varactors, 16 were reported.…”

mentioning

confidence: 99%

Electrostatic capacitance and Faraday cage behavior of carbon nanotube forests

Ya’akobovitz

Bedewy

Hart

2015

Applied Physics Letters

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mentioning

confidence: 99%

Electrostatic capacitance and Faraday cage behavior of carbon nanotube forests

Ya’akobovitz

Bedewy

Hart

2015

Applied Physics Letters

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“…However, the usual quantum mechanical Raman theory [150] presents some flaws [229] in agreement with the point that the quantum mechanical theory generally neglects the locality of energy states and that the law of energy conservation is not always respected [26,98]. We state that the description of the double resonance back scattering on defects and edges and which is supposed to give account for the so-called “Ddisorder” peak (at ~1350 cm −1 ) does not fulfill the energy conservation law [26] (only the momentum conservation).…”

Section: Brief Review Of Revisited Carbon Raman Spectroscopymentioning

confidence: 91%

“…The NEMS technology is distinguished from molecular nanotechnology or molecular electronics in that the latter must also consider surface chemistry and solid-state phonon and electronic quantum mechanical aspects which can affect mechanical, electric and optoelectronic properties, friction and that can cause high signal/noise ratio ([89,90,91,92]. Mechanical deformation and electrical contact properties and adhesion between carbon nanotubes are important aspects of their quality and dynamic performances [93,94,95,96,97,98] and explaining why they must be selected and controlled upon their characteristics, size and defect content.…”

Section: Brief Review On Main Mems and Nems Characteristicsmentioning

confidence: 99%

Selective Carbon Material Engineering for Improved MEMS and NEMS

Neuville¹

2019

Micromachines

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The development of micro and nano electromechanical systems and achievement of higher performances with increased quality and life time is confronted to searching and mastering of material with superior properties and quality. Those can affect many aspects of the MEMS, NEMS and MOMS design including geometric tolerances and reproducibility of many specific solid-state structures and properties. Among those: Mechanical, adhesion, thermal and chemical stability, electrical and heat conductance, optical, optoelectronic and semiconducting properties, porosity, bulk and surface properties. They can be affected by different kinds of phase transformations and degrading, which greatly depends on the conditions of use and the way the materials have been selected, elaborated, modified and assembled. Distribution of these properties cover several orders of magnitude and depend on the design, actually achieved structure, type and number of defects. It is then essential to be well aware about all these, and to distinguish and characterize all features that are able to affect the results. For this achievement, we point out and discuss the necessity to take into account several recently revisited fundamentals on carbon atomic rearrangement and revised carbon Raman spectroscopy characterizing in addition to several other aspects we will briefly describe. Correctly selected and implemented, these carbon materials can then open new routes for many new and more performing microsystems including improved energy generation, storage and conversion, 2D superconductivity, light switches, light pipes and quantum devices and with new improved sensor and mechanical functions and biomedical applications.

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“…For example, CNTs, 1D carbon atom structures with diameters in the nanometer range, have many advantages for use in moving parts of M/NEM switches, such as superior mechanical strength, electrical conductivity, and thermal conductivity 20,21,32,244–248. Moreover, recent advanced CNT fabrication processes have enabled implementation of CNTs in 3D structures 249–251. Indeed, many studies have been reported of low‐voltage operating M/NEM switching devices that exploit CNTs for structural material 211,213,215,252–256.…”

Section: High‐performance Nems/mems Devicesmentioning

confidence: 99%

Geometrically Structured Nanomaterials for Nanosensors, NEMS, and Nanosieves

Seo

Yoo

et al. 2020

Advanced Materials

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Recently, geometrically structured nanomaterials have received great attention due to their unique physical and chemical properties, which originate from the geometric variation in such materials. Indeed, the use of various geometrically structured nanomaterials has been actively reported in enhanced‐performance devices in a wide range of applications. Recent significant progress in the development of geometrically structured nanomaterials and associated devices is summarized. First, a brief introduction of advanced nanofabrication methods that enable the fabrication of various geometrically structured nanomaterials is given, and then the performance enhancements achieved in devices utilizing these nanomaterials, namely, i) physical and gas nanosensors, ii) nanoelectromechanical devices, and iii) nanosieves are described. For the device applications, a systematic summary of their structures, working mechanisms, fabrication methods, and output performance is provided. Particular focus is given to how device performance can be enhanced through the geometric structures of the nanomaterials. Finally, perspectives on the development of novel nanomaterial structures and associated devices are presented.

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Integrated Carbon Nanotube Array as Dry Adhesive for High‐Temperature Silicon Processing

Cited by 26 publications

References 26 publications

Electrostatic capacitance and Faraday cage behavior of carbon nanotube forests

Electrostatic capacitance and Faraday cage behavior of carbon nanotube forests

Selective Carbon Material Engineering for Improved MEMS and NEMS

Geometrically Structured Nanomaterials for Nanosensors, NEMS, and Nanosieves

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