Integrated array of SAW sensors for gas analysis

Анисимкин, В. И.; Fedosov, V.I.; Krystal, R.G.; Medved, A. V.; Zemlyakov, V. E.; Verona, É.

doi:10.1109/ultsym.1998.762205

Cited by 3 publications

(4 citation statements)

References 8 publications

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“…The need to determine and assess multiple pieces of chemical information simultaneously has spawned a variety of chemical sensors . The growing trend toward measuring “everything” in a sample has also lead to the development of the so-called artificial noses and tongues that rely on a variety of elegant array strategies. − Sensor arrays can be subdivided into those that use cantilevers, conducting polymers, electrochemistry, physical optics, the piezoelectric effect, or surface acoustic waves . In an optical sensor, one requires a light source, appropriate sensing chemistry (i.e., a recognition element), a means to immobilize the desired sensing chemistry so it may be reused, and a detector .…”

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Optical Sensor Array and Integrated Light Source

Cho

Bright

2001

Anal. Chem.

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We report a new, solid-state, integrated optical array sensor platform. The optical sensor array and integrated light source (OSAILS) is demonstrated for quenchometric O2 detection. The OSAILS requires low voltages (3-5 V dc), it is stable (< or = 5% RSD over the course of several hours of continuous operation), it is reproducible and reversible (< or =3% RSD), it exhibits a rapid response time (<30 s), and it provides good detection limits (0.2% O2). The OSAILS opens the door to a number of new optical sensor array strategies.

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confidence: 99%

Optical Sensor Array and Integrated Light Source

Cho

Bright

2001

Anal. Chem.

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confidence: 99%

“…Artificial “noses” and “tongues” use a variety of elegant sensor array strategies − to provide chemical information about a sample. Chemically responsive sensor arrays can be subdivided into those that exploit cantilevers, conducting polymers, electrochemistry, the piezoelectric effect, physical optics, or surface acoustic waves . To date, sensor arrays have been fabricated by using a number of approaches including, ink-jet 9 and screen printing, photolithography, and photodeposition. 7c-f…”

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confidence: 99%

Pin-Printed Chemical Sensor Arrays for Simultaneous Multianalyte Quantification

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Bright

2002

Anal. Chem.

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A new approach to rapidly produce micrometer-scale sensor elements into reusable multianalyte chemical sensor arrays is demonstrated. By using pin printing technology in concert with sol-gel processing methods, we form discrete xerogel-based microsensors on a planar substrate. We illustrate the new approach by forming discrete 02- and pH-responsive sensing elements into arrays that allow one to simultaneously determine O2 and pH in aqueous samples. The pin printing method allows one to prepare sensor elements that are on the order of 100 microm in diameter, 1-2 microm thick, at a rate of approximately one sensor element per second with a single pin. Within a given calibrated array, the sensor element-to-sensor element response is reproducible to within 5%, the sensor element short- and long-term reproducibilities are 3 and 6%, respectively, and the array-to-array response reproducibility is 11%. These results demonstrate the potential of this methodology for rapidly forming ensembles of reusable sensor arrays for simultaneous multianalyte detection.

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“…It is also possible to use the anisotropic behaviour of crystalline quartz and a Pd film as sensing membrane. In this case one can measure gas concentrations of different organic gases in a mixture and the humidity by using delay lines [10].…”

Section: Surface Acoustic Waves and Devicesmentioning

confidence: 99%

SAW sensors for direct and remote measurement

Buff

2002 IEEE Ultrasonics Symposium, 2002. Proceedings.

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SAW devices have been shown to be suitable not only for signal processing but also for sensor applications. Beginning with the early seventies of the last century, SAW sensors have been under investigation for several decades. The physical effect of a change of the elastic constants of the substrate material or a change in the mass loading under the influence of changing conditions in the environment, lead to a change in the phase velocity of the surface acoustic wave and commonly to a frequency shift in the SAW devices. Numerous solutions for sensors and sensor systems are based on this effect. However, up to now there are no mass applications for SAW sensors. On the other hand SAW sensors have some features that allow creating of unique sensor systems for measurements which are not possible otherwise. This paper will discuss some aspects of today's status from the point of view of practical applications. 0-7803-7582-3/02/$17.00 (c) 2002 IEEE 2002 IEEE ULTRASONICS SYMPOSIUM-435

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Integrated array of SAW sensors for gas analysis

Cited by 3 publications

References 8 publications

Optical Sensor Array and Integrated Light Source

Optical Sensor Array and Integrated Light Source

Pin-Printed Chemical Sensor Arrays for Simultaneous Multianalyte Quantification

SAW sensors for direct and remote measurement

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