Integral nanoindentation evaluation of TiO2, SnO2, and ZnO thin films deposited via spray-pyrolysis on glass substrates

Villegas, Edgar A.; Parra, Rodrigo; Ramajo, Leandro Alfredo

doi:10.1007/s10854-018-0404-3

Cited by 12 publications

(8 citation statements)

References 34 publications

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“…The present H and E values were in a reasonable range compared with the previous studies [15,16,43]. Indeed, the of SnO 2 film (F/Sn = 0) was comparable with the H = 6.1 ± 0.1 GPa and E = 78.5 ± 0.4 GPa of SnO 2 films prepared by spray-pyrolysis [43]. Meanwhile, the H of 6.9–10.2 GPa and E of 115.1–131.7 GPa for the present FTO films were larger than H = 5.1 GPa and E = 71.1 GPa for FTO thin films deposited by chemical vapor deposition [16], and comparable with the H = 9.01 GPa and E = 125.24 GPa for the as-deposited FTO film prepared by APCVD [15].…”

Section: Resultssupporting

confidence: 89%

“…As shown in Figure 7a,b, the hardness of the FTO films deposited at F/Sn = 0, 0.1, 0.5, and 1.0 was 5.6 ± 0.2, 6.9 ± 0.3, 12.3 ± 0.4, and 10.2 ± 0.3 GPa, respectively, and the Young’s modulus for the corresponding films was 95.2 ± 7.1, 115.1 ± 8.7, 131.7 ± 8.0, and 120.6 ± 7.6 GPa, respectively. The present H and E values were in a reasonable range compared with the previous studies [15,16,43]. Indeed, the of SnO 2 film (F/Sn = 0) was comparable with the H = 6.1 ± 0.1 GPa and E = 78.5 ± 0.4 GPa of SnO 2 films prepared by spray-pyrolysis [43].…”

Section: Resultssupporting

confidence: 88%

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Nanomechanical and Material Properties of Fluorine-Doped Tin Oxide Thin Films Prepared by Ultrasonic Spray Pyrolysis: Effects of F-Doping

Tuyen

Tiên

2019

Materials

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Fluorine-doped tin oxide (FTO) thin films were deposited on glass substrates using ultrasonic spray pyrolysis (USP) at a fixed substrate temperature of 400 °C and various Fluorine/Tin (F/Sn) atomic ratios of 0, 0.1, 0.5, and 1.0. Effects of F/Sn atomic ratios on structural-morphological, compositional, electrical, optical, and nanomechanical properties of the FTO thin films were systematically studied. The FTO films exhibited a tetragonal structure with preferred orientations of (110), (200), and (211), and polycrystalline morphology with spear-like or coconut shell-like particles on the surfaces. The presence of F-doping was confirmed by XPS results with clear F1s peaks, and F-concentration was determined to be 0.7% for F/Sn = 0.1 and 5.1% for F/Sn = 0.5. Moreover, the resistivity of FTO films reduced remarkably from 4.1 mΩcm at F/Sn = 0 to 0.7 mΩcm at F/Sn = 1, primarily due to the corresponding increase of carrier concentration from 2 × 1020 cm−3 to 1.2 × 1021 cm−3. The average optical transmittance of the films prepared at F/Sn of 0–0.5 was over 90%, and it decreased to 84.4% for the film prepared at F/Sn = 1. The hardness (H) and Young’s modulus (E) of the FTO films increased when the F/Sn ratios increased from 0 to 0.5, reaching maximum values of H = 12.3 ± 0.4 GPa, E = 131.7 ± 8.0 GPa at F/Sn = 0.5. Meanwhile, the H and E reduced considerably when the F/Sn ratio further increased to 1.0, following the inverse Hall-Petch effect approximately, suggesting that the grain boundary effect played a primary role in manipulating the nanomechanical properties of the FTO films. Furthermore, favorable mechanical properties with large H/Ef and H 3 / E f 2 ratios were found for the FTO film prepared at F/Sn = 0.5, which possessed high crystallinity, large grain size, and compact morphology.

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Section: Resultssupporting

confidence: 89%

Section: Resultssupporting

confidence: 88%

Nanomechanical and Material Properties of Fluorine-Doped Tin Oxide Thin Films Prepared by Ultrasonic Spray Pyrolysis: Effects of F-Doping

Tuyen

Tiên

2019

Materials

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“…To enhance material performance in such applications, the study of its elastic and optical properties is of paramount importance. In this sense, in the last decade many experimental investigations have addressed the different structural and optical properties of pure and doped ZnO systems [3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18]. As a general remark, these investigations frequently report how the material band gap energy (E g ) and its elastic moduli depend on different parameters related to the processing method.…”

Section: Introductionmentioning

confidence: 99%

Experimental and ab initio study of the structural and optical properties of ZnO coatings: Performance of the DFT+U approach

Apaolaza

Richard

Tejerina

2020

PAC

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In this work, ZnO coatings were produced by the spray-pyrolysis technique and characterized by scanning electron microscopy, X-ray diffraction and optical transmittance spectroscopy. The experimental results were compared to predictions obtained from electronic-structure calculations based on the Density Functional Theory plus U (DFT+U) approach. To this purpose, the 2H, 4H and 6H polytypes of ZnO were theoretically analysed, and DFT+U was assessed for the calculation of structural, electronic and optical properties of the hexagonal ZnO structures. We found that DFT+U is an effective and accurate method that combined with experimental measurements, allows a deeper insight about the coatings of the wurtzite (2H) phase synthesized in the laboratory. This comprehensive study of the pure ZnO is the first step towards the study of more complex ZnO-based coatings.

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“…Consequently with the film thickness and grain size decrease, a clear increase of E as well as H is was observed. This generalized film strengthening (increase of the resistance to elastic ( E ) and plastic ( H ) strains) by reducing the thickness is a typical size effect observed in soft films on hard substrates [13][14][15][16][17][18][19][20][21][22][23][24][25]. In particular, this strengthening effect is intensified as the film thickness decreases because the effects of the mechanical properties mismatch at the film-to-substrate interface become stronger, and a more important influence of the substrate mechanical behavior on the sample effective response is achieved.…”

Section: Resultsmentioning

confidence: 99%

“…The mechanical properties of thin films can be different than the bulk material depending on the substrate mechanical properties and the film dimensions. Through history, many researchers have given several theoretical [13][14][15] and experimental [16][17][18][19][20][21][22][23][24][25] evidence of this phenomenon. To practical effects, it is generally accepted that for small indentation depths, the elastic modulus (less than 1% to 3% of the total film thickness) and indentation hardness (less than 15% to 10% of the total film thickness) of the films are not affected by the substrate.…”

Section: Introductionmentioning

confidence: 99%

Thickness and microstructure influence on the nanocrystalline Cu thin films’ mechanical properties

Roa

Sirena

2021

Journal of Materials Research

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We report a systematic study about the thickness and microstructure influence on the mechanical properties of nanocrystalline Cu thin films grown by DC sputtering. Mechanical properties were determined by using atomic force microscopy-assisted nanoindentation. Results showed a clear decrease of the elastic modulus and indentation hardness as the film thickness and grain size increase. Annealing time as well as the temperature seem to affect the mechanical behavior of the films by inducing microstructural changes, producing comparable changes to those produced by size effects (film thickness). Results suggest that both effects are important to explain the mechanical behavior of polycrystalline thin films. This work helps understanding what physical mechanisms play a fundamental role on the mechanical behavior of thin films.

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Integral nanoindentation evaluation of TiO2, SnO2, and ZnO thin films deposited via spray-pyrolysis on glass substrates

Cited by 12 publications

References 34 publications

Nanomechanical and Material Properties of Fluorine-Doped Tin Oxide Thin Films Prepared by Ultrasonic Spray Pyrolysis: Effects of F-Doping

Nanomechanical and Material Properties of Fluorine-Doped Tin Oxide Thin Films Prepared by Ultrasonic Spray Pyrolysis: Effects of F-Doping

Experimental and ab initio study of the structural and optical properties of ZnO coatings: Performance of the DFT+U approach

Thickness and microstructure influence on the nanocrystalline Cu thin films’ mechanical properties

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