“…Since only ions are detected in LEIS, and only ions that scatter off of the outermost atomic layer of a material have short enough interaction times to avoid neutralization, LEIS is uniquely sensitive to the atomic composition of the outermost layer of a material. 2,9,16 Indeed, LEIS is so surface sensitive that even a monolayer of contamination, e.g., adventitious carbon, can obscure the signal from a material.…”