Initial Growth Layer and Magnetic Properties of CoCrPt Perpendicular Media.

洋之, 上住; 武仁, 島津; 潤, 寺川; 泰志, 酒井; 俊司, 竹野入; 貞幸, 渡辺; 裕明, 村岡; 慶久, 中村

doi:10.3379/jmsjmag.26.205

Cited by 5 publications

(1 citation statement)

References 10 publications

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“…Then the pole figure for ϭ21.95°and 2ϭ43.90°showed a weak ring-shaped peak at ϭ70.5°in addition to the strong peak at ϭ0°, as shown in Fig. Recently, similar reports on the formation of a fcc layer in a c-axis textured hcp structure have appeared elsewhere; 18,19 there is a necessity to FIG. Note that Fig.…”

Section: A Crystalline Structures Of Cocrta Filmssupporting

confidence: 71%

Performance of inductively coupled plasma assisted sputtering with internal coil for ferromagnetic CoCrTa film deposition

Okimura

Oyanagi

2003

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Articles you may be interested inLow-temperature oriented growth of vanadium dioxide films on CoCrTa metal template on Si and vertical metal-insulator transition J. Vac. Sci. Technol. A 30, 051502 (2012); 10.1116/1.4733995In situ measurement of surface stress evolution during sputter deposition of Co Cr X ∕ Cr ( X = Pt , Ta ) thin film and its magnetic properties J. Appl. Phys. 97, 10N116 (2005); 10.1063/1.1854253 Dynamic control of substrate bias for highly c -axis textured thin ferromagnetic CoCrTa film in inductively coupled plasma-assisted sputteringThe performance of inductively coupled plasma ͑ICP͒-assisted sputtering with an internal coil was revealed for deposition of ferromagnetic Co-based alloy films. Three types of internal coil, a directly grounded bare coil, a capacitively coupled bare coil and an insulated coil, were investigated with regard to the crystalline structure of films and plasma characteristics. Highly c-axis textured hexagonal-close-packed ͑hcp͒ film growth was achieved in the bare coil system at a medium operating Ar pressure of 1.3 Pa. Pole figure measurements showed that the film grown on a low-temperature Si substrate contained small face-centered-cubic phase in the c-axis textured hcp crystal. Plasma diagnostics suggested that high plasma space potential beyond 80 V caused highly textured growth through the effect of ion bombardment with proper energies for crystallization. The superior capability of ICP-assisted sputtering with a capacitively coupled bare coil was revealed for textured growth in the thin layer on a substrate surface. A high deposition rate was achieved as a result of high electron density of the order of 10 11 cm Ϫ3 in ICP-assisted sputtering with an insulated coil. However, the insulated coil system could not achieve textured growth.

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Section: A Crystalline Structures Of Cocrta Filmssupporting

confidence: 71%

Performance of inductively coupled plasma assisted sputtering with internal coil for ferromagnetic CoCrTa film deposition

Okimura

Oyanagi

2003

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Quantification of intergranular exchange coupling in CoPtCr-based perpendicular recording media via ferromagnetic resonance measurements

Richardson

Srinivasan

Katz

et al. 2017

Applied Physics Letters

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Intergranular exchange fields in CoPtCr granular media materials were quantified through ferromagnetic resonance measurements in various magnetic states. The data indicate that the exchange field in CoPtCr granular films with no oxide segregant is comparable to the saturation magnetization of the films. With an introduction of a SiO2 segregant, however, the exchange field decreases. A 30% volume fraction of the segregant reduces the strength of the intergranular exchange coupling to zero.

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Microstructure and magnetic properties of CoPtCr-SiO/sub 2/ perpendicular recording media

et al. 2002

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Initial Growth Layer and Magnetic Properties of CoCrPt Perpendicular Media.

Cited by 5 publications

References 10 publications

Performance of inductively coupled plasma assisted sputtering with internal coil for ferromagnetic CoCrTa film deposition

Performance of inductively coupled plasma assisted sputtering with internal coil for ferromagnetic CoCrTa film deposition

Quantification of intergranular exchange coupling in CoPtCr-based perpendicular recording media via ferromagnetic resonance measurements

Microstructure and magnetic properties of CoPtCr-SiO/sub 2/ perpendicular recording media

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