1978
DOI: 10.1002/pssb.2220900230
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Infrared absorption of silicon irradiated by protons

Abstract: Hydrogen implantations into silicon samples at room temperature and at 190°C are carried out. Infrared studies are performed on these samples before and following annealing. Previously observed divacancy and hydrogen vibrational bands are found as well as higher‐order‐bands not previously found in proton irradiation. In addition new hydrogen vibrational bands and other bands are observed and discussed.

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Cited by 69 publications
(12 citation statements)
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“…5͒. Since the original work by Stein, a number of additional Si-H absorption lines have been observed in proton-implanted silicon 77,78 or silicon grown in a H 2 ambient and subsequently irradiated with electrons 79,80 or neutrons. 81 At present, more than 30 distinct absorption lines have been observed in the frequency region associated with Si-H stretch modes.…”
Section: Crystalline Siliconmentioning
confidence: 99%
See 1 more Smart Citation
“…5͒. Since the original work by Stein, a number of additional Si-H absorption lines have been observed in proton-implanted silicon 77,78 or silicon grown in a H 2 ambient and subsequently irradiated with electrons 79,80 or neutrons. 81 At present, more than 30 distinct absorption lines have been observed in the frequency region associated with Si-H stretch modes.…”
Section: Crystalline Siliconmentioning
confidence: 99%
“…In addition, a number of lines have been observed in the region 550-900 cm Ϫ1 , which are ascribed to angular vibrations of Si-H bonds. 77,78…”
Section: Crystalline Siliconmentioning
confidence: 99%
“…9 It has to be noted that not only LVMs of fully hydrogenated vacancies have been reported, but also those of partially hydrogenated vacancies VH, VH 2 , or VH 3 in silicon. 8 A H-related absorption mode at 2178 cm −1 at RT has also been reported in proton implanted samples 10 and in FZ silicon grown in hydrogen atmosphere. 11 This mode was observed at LHeT in C-rich silicon 12 at 2183.32 (2183) cm −1 with a full width at half maximum (FWHM) of 0.12 cm −1 .…”
Section: Introductionmentioning
confidence: 71%
“…Among several peaks, the sharp peak at about 2223 cm Ϫ1 has been studied extensively. Bech Nielsen et al, 17 for example, determined the symmetry of the defect responsible for this peak by measuring its response to uniaxial stresses. Figure 3 shows a summary of absorption peaks observed in specimens grown in a hydrogen ambient and protonimplanted specimens.…”
Section: Methodsmentioning
confidence: 99%