Influences of misalignments on circular path measurement based on dual-beam plane mirror interferometer

Tang, Shanzhi; Zhao, Wei; Zhong, Lihong; Gao, Jianmin

doi:10.1016/j.ijleo.2013.01.074

Cited by 3 publications

(1 citation statement)

References 13 publications

(17 reference statements)

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“…Therefore, the accelerometer can be applied to the TCP response measurement but is not suitable for the contour measurement at a high feed motion. Shanzhi et al [13] and Tang et al [14] proposed the TCP displacement measurement for a circular test by a laser interferometer. The X-axis and Y-axis displacements of TCP were measured on the optical interference principle.…”

Section: Introductionmentioning

confidence: 99%

A Study of 2D Contour Measurement System at Tool Center Point of Machine Tools

Chen

Tsai

2022

Machines

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This study proposes a 2D contour measurement system at the tool center point (TCP) that consists of a Blu-ray pickup head and position sensitive detector (PSD). The TCP displacement is equivalent to the relative position between the tool and workpiece. When the machine tools operate the machine part along the desired contour, the TCP displacement affects the machining geometric accuracy. To evaluate the TCP displacement, the contour errors are measured by the cross-grid encoder (KGM) in practice. However, it is difficult to install KGM as it is large and expensive. In this study, an optical measurement system (OMS) is constructed to measure the TCP displacement, named TCP-OMS. A Blu-ray pickup head was installed on the spindle as a tool, and a PSD was installed on the table as a workpiece. To enhance the measurement signal’s resolution and precision of TCP-OMS, the noise was reduced by an AC voltage stabilizer, a DC regulator, and a low-pass filter. The experimental results show that the resolution of displacement measurement was less than 1 , and the linearity regions of the X-orientation and Y-orientation were ±3 . The motion test on the circular paths were performed on an actual machine tool, and the repeatability tests of this measurement system were verified. The measurement data of circular paths were collected by TCP-OMS and KGM and the results were then compared. When the feed rate of the circular paths increased, the circular deviations were magnified, simultaneously. The axis reversal spikes were observed at the quadrants of a circular path. These measurement results of TCP-OMS matched with the measurement results of KGM. The TCP-OMS developed in this study is characterized by simple installation, compactness, and a low price. It is suitable for 2D contour measurement at the tool center point of machine tools.

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Section: Introductionmentioning

confidence: 99%

A Study of 2D Contour Measurement System at Tool Center Point of Machine Tools

Chen

Tsai

2022

Machines

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An algorithm for circular test and improved optical configuration by two-dimensional (2D) laser heterodyne interferometer

Tang

Han

et al. 2016

Review of Scientific Instruments

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Circular test is an important tactic to assess motion accuracy in many fields especially machine tool and coordinate measuring machine. There are setup errors due to using directly centring of the measuring instrument for both of contact double ball bar and existed non-contact methods. To solve this problem, an algorithm for circular test using function construction based on matrix operation is proposed, which is not only used for the solution of radial deviation (F) but also should be applied to obtain two other evaluation parameters especially circular hysteresis (H). Furthermore, an improved optical configuration with a single laser is presented based on a 2D laser heterodyne interferometer. Compared with the existed non-contact method, it has a more pure homogeneity of the laser sources of 2D displacement sensing for advanced metrology. The algorithm and modeling are both illustrated. And error budget is also achieved. At last, to validate them, test experiments for motion paths are implemented based on a gantry machining center. Contrast test results support the proposal.

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An improved differential-grating plane-mirror heterodyne interferometer for small roll angle measurement of a linear motion

Tang

Ren

Han

et al. 2020

Review of Scientific Instruments

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In the previous studies on roll angle (ROLL) measurements which are based on the concept of the combination of a diffraction grating displacement technique and a laser heterodyne interferometry, there is always a lack of ideally functional retro-reflectors and corresponding optical configurations resulting in misalignment and unconfident monitoring. To overcome this problem, a differential-grating plane-mirror heterodyne interferometer is proposed in this paper, in which the grating displacement sensing method is utilized to promote angular interferometry as a reliable ROLL measurement. The working mechanism is thoroughly demonstrated through the theoretical derivation and performance analysis. In particular, the exploited configuration here including a differential grating with excellent robustness and a plane mirror with doubled resolution enables improved performance compared with the existing methods. Furthermore, a corresponding prototype is also developed to validate the proposed method successfully. So, it features merits such as an ultra-high resolution up to 1 nrad, a high sampling rate of kHz and easy practicability, which is significant for high-accuracy and real-time ROLL monitoring and compensation for advanced manufacturing and scientific instruments.

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Influences of misalignments on circular path measurement based on dual-beam plane mirror interferometer

Cited by 3 publications

References 13 publications

A Study of 2D Contour Measurement System at Tool Center Point of Machine Tools

A Study of 2D Contour Measurement System at Tool Center Point of Machine Tools

An algorithm for circular test and improved optical configuration by two-dimensional (2D) laser heterodyne interferometer

An improved differential-grating plane-mirror heterodyne interferometer for small roll angle measurement of a linear motion

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