Influences of deposition parameters on microstructure and dielectric properties of BST thin film deposited by R.F. magnetron sputtering

Oxygen effects on barium strontium titanate morphology and MOS device performance

“…Dielectric constant values depend on the materials' chemical composition, crystallinity, deposition conditions, or post-deposition annealing among other variables. Reported dielectric constants for other BST films range from near 100 to around 600 [13,[23][24][25][26][27][28][29]. …”