1998
DOI: 10.1007/s11664-998-0109-0
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Influence of water absorption by silicate glass on the strains in passivated Al conductor lines

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“…Clear evidence has been reported in the literature for volume swelling, ɛ 0 , measured directly via dimension changes in the silica glass, and indirectly via stress generation within the glass. The swelling behavior has been determined by length 33 and curvature measurements on silica glass bars 34 and by X‐ray diffraction strain measurements 35 on silica glass. Gorbacheva and Zaoints 33 soaked fused silica prisms (25 × 5 × 5 mm) in water at 80°C for 20 months.…”
Section: Water Diffusion and Volume Expansion In Silicamentioning
confidence: 99%
“…Clear evidence has been reported in the literature for volume swelling, ɛ 0 , measured directly via dimension changes in the silica glass, and indirectly via stress generation within the glass. The swelling behavior has been determined by length 33 and curvature measurements on silica glass bars 34 and by X‐ray diffraction strain measurements 35 on silica glass. Gorbacheva and Zaoints 33 soaked fused silica prisms (25 × 5 × 5 mm) in water at 80°C for 20 months.…”
Section: Water Diffusion and Volume Expansion In Silicamentioning
confidence: 99%