Influence of total gas pressure on the microstructure and properties of CrAlN films deposited by a pulsed DC balanced magnetron sputtering system

Khamseh, Sara; Nosé, M.; Kawabata, Tokimasa; Matsuda, Kenji; Ikeno, Susumu

doi:10.1016/j.jallcom.2010.04.145

Cited by 16 publications

(8 citation statements)

References 33 publications

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“…The properties exhibited by this ternary system make it a good candidate for tribological applications. Other quaternary alloys based on CrN coatings, like Cr-Mo-C-N, Cr-Si-C-N, Cr-Al-Si-N, Cr-Mo-Si-N and Cr-Al-C-N [17][18][19][20] have shown improved mechanical and tribological properties. This is mainly due to grain refinement at nanoscale, precipitation hardening, formation of hard intermetallic and amorphous phases, lowering the coefficient of friction and increasing the toughness of the coatings [9,12].…”

Section: Introductionmentioning

confidence: 99%

Influence of carbon content on the microstructure, mechanical and tribological properties of CrAlCN coatings deposited by DC unbalanced magnetron sputtering

et al. 2018

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The influence of carbon content on the microstructure, mechanical and tribological properties of CrAlCN was systematically investigated. For this purpose, five duplex coatings of CrAlCN deposited on AISI H13 steel by the magnetron-sputtering technique were developed. The carbon content of the coatings was varied between 10.26 and 80.56 at% by modifying the percentage of methane in the working gas mixture CH 4 /(Ar + N 2). The effect of carbon content on the morphology, microstructure, mechanical and tribological properties of the CrAlCN coatings was evaluated. Coatings showed a high crystalline structure at low carbon contents, consisting mainly of chromium nitrides and aluminium-chromium nitrides. With the increase of carbon content in the coatings, chromium carbides formed at the expense of nitrides, presenting a highly amorphous structure with high carbon content. Initially, the hardness and Young's modulus of the coatings increased with carbon content, possibly due to hardening of the interstitial solid solution of carbon within the matrix of CrAlN. Then, they were decreased along with the coefficient of friction and wear rate due to the self-lubricating effect of graphite-like carbon. However, above the 54.74 at% carbon, the wear rate of CrAlCN increased again, probably due to the low hardness and adhesion of the coating. The CrAlCN coating with a carbon content of 21.96 at% presented the best balance between mechanical and tribological properties.

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Section: Introductionmentioning

confidence: 99%

Influence of carbon content on the microstructure, mechanical and tribological properties of CrAlCN coatings deposited by DC unbalanced magnetron sputtering

et al. 2018

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“…As reported in the literature, the oxidation resistance of CrN was up to 650 1C (vs. 500 1C, TiN) [11]; Kawate et al have reported that CrAlN films were stable up to 900 1C (vs. 750 1C, TiAlN) [12]. Otherwise, it is well known that CrN and CrAlN films have been widely used as hard, protective and wear coatings for cutting and forming tools due to their high hardness, good wear resistance, chemical inertness, and good thermal stability [10][11][12][13][14][15][16]. However, until now there are very few reports on the optical and electrical properties of CrN and CrAlN films.…”

Section: Introductionmentioning

confidence: 99%

Microstructure, optical and electrical properties of CrAlN film as a novel material for high temperature solar selective absorber applications

Chen¹,

Guo²,

Chen³

et al. 2014

Materials Letters

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“…Due to high solubility of CrN to AlN, the (Cr 1x Al x )N coatings can be prepared with a wide range of compositions. Usually, low temperature (Cr 1x Al x )N coatings are mostly deposited by dc or by medium frequency reactive magnetron sputtering [5,14,15]. According to [9,10], crystal structure of (Cr 1x Al x )N coatings changes from the B1-NaCl-type into B4wurtzite-type between 57 at.% and 75 at.% Al.…”

Section: Introductionmentioning

confidence: 99%

Investigation of the properties of low temperature (Cr_1‐xAl_x)N coatings deposited via hybrid PVD DC‐MSIP/HPPMS

Bagcivan

Bobzin

Brugnara³

2013

Materialwissenschaft Werkst

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Ternary nitrides such as (Cr1‐xAlx)N deposited via PVD find widespread application as hard protective coatings on cutting tools and as corrosion and wear resistant coatings on mechanical components due to their good tribological, mechanical and chemical properties. The combination of these properties makes (Cr1‐xAlx)N coatings attractive for many applications. For an effective protection of coated parts a uniform layer of coating material is required. In this regard, the high power pulse magnetron sputtering (HPPMS) technology offers possibilities to improve coating thickness uniformity and to enhance mechanical properties. The present work deals with the investigation of the influence of process parameters on the properties of (Cr1‐xAlx)N deposited at 200°C via DC‐MSIP/HPPMS technology in an industrial coating unit. The Al content was varied between 22 at.% and 88 at.%. Further, the bias voltage was varied from 0 V up to –200 V. Chemical composition, morphology, mechanical properties and phase composition of the coatings were analyzed by means of scanning electron microscopy (SEM) with energy dispersive spectroscopy (EDS), Nanoindentation and XRD (X‐Ray diffraction), respectively. The maximum hardness of 20 GPa was achieved for the coatings with 31 at.% Al and 51 at.% Al. With increasing bias voltage a preferred (200) grain orientation and denser crystalline morphology are indentified. An improvement of coating thickness distribution is observed for the coatings deposited with a bias voltage of –100 V and –150 V.

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Influence of total gas pressure on the microstructure and properties of CrAlN films deposited by a pulsed DC balanced magnetron sputtering system

Cited by 16 publications

References 33 publications

Influence of carbon content on the microstructure, mechanical and tribological properties of CrAlCN coatings deposited by DC unbalanced magnetron sputtering

Influence of carbon content on the microstructure, mechanical and tribological properties of CrAlCN coatings deposited by DC unbalanced magnetron sputtering

Microstructure, optical and electrical properties of CrAlN film as a novel material for high temperature solar selective absorber applications

Investigation of the properties of low temperature (Cr_1‐xAl_x)N coatings deposited via hybrid PVD DC‐MSIP/HPPMS

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Influence of total gas pressure on the microstructure and properties of CrAlN films deposited by a pulsed DC balanced magnetron sputtering system

Cited by 16 publications

References 33 publications

Influence of carbon content on the microstructure, mechanical and tribological properties of CrAlCN coatings deposited by DC unbalanced magnetron sputtering

Influence of carbon content on the microstructure, mechanical and tribological properties of CrAlCN coatings deposited by DC unbalanced magnetron sputtering

Microstructure, optical and electrical properties of CrAlN film as a novel material for high temperature solar selective absorber applications

Investigation of the properties of low temperature (Cr1‐xAlx)N coatings deposited via hybrid PVD DC‐MSIP/HPPMS

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Investigation of the properties of low temperature (Cr_1‐xAl_x)N coatings deposited via hybrid PVD DC‐MSIP/HPPMS