2011
DOI: 10.1186/1556-276x-6-516
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Influence of the oxide layer for growth of self-assisted InAs nanowires on Si(111)

Abstract: The growth of self-assisted InAs nanowires (NWs) by molecular beam epitaxy (MBE) on Si(111) is studied for different growth parameters and substrate preparations. The thickness of the oxide layer present on the Si(111) surface is observed to play a dominant role. Systematic use of different pre-treatment methods provides information on the influence of the oxide on the NW morphology and growth rates, which can be used for optimizing the growth conditions. We show that it is possible to obtain 100% growth of ve… Show more

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Cited by 32 publications
(32 citation statements)
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“…The absence of metal droplets on the top of NWs is similar to the InAs NWs grown on Si by MBE which was ascribed to vapour-solid (VS) growth mechanism [20-22]. As the growth conditions of our NWs are similar, we assume that our NW growth also follows a VS mechanism.…”
Section: Resultssupporting
confidence: 69%
“…The absence of metal droplets on the top of NWs is similar to the InAs NWs grown on Si by MBE which was ascribed to vapour-solid (VS) growth mechanism [20-22]. As the growth conditions of our NWs are similar, we assume that our NW growth also follows a VS mechanism.…”
Section: Resultssupporting
confidence: 69%
“…Usually, a native oxide layer of ~1.5 nm exists on the surface of the Si (111) substrate. [19][20][21] The hardness of the SiO 2 layer (~2.0 GPa 22 ) is much smaller than that of the Si (111) substrate (~11.5 GPa 21 ), and thus the oxide layer can be sheared easily and the initial friction coefficientis small. When the native 10 oxide layer is worn out, the friction coefficient increases.…”
Section: Film Characterizationmentioning
confidence: 99%
“…However, both sputtered and further etched as well as native oxides can vary in thickness and quality over the sample resulting in inhomogeneous NW growth as observed for InAs NWs in Ref. [10]. With this respect, highly reproducible oxide layers are required.…”
Section: Introductionmentioning
confidence: 96%