Influence of the laser source position on the generation of Rayleigh modes in a layer–substrate structure with varying degrees of adhesion

Robin, Martin; Jenot, Frédéric; Ouaftouh, Mohammadi; Duquennoy, Marc

doi:10.1016/j.ultras.2019.106051

Cited by 3 publications

(2 citation statements)

References 18 publications

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“…The advantage of non-destructive evaluation using acoustic is that it is possible to evaluate properties by measuring the acoustic velocity with high precision in a small area based on the acoustic-elastic effect, which is the relationship between the acoustic velocity propagating inside the material and the internal/applied stress. Based on this, properties of single and composite materials such as acoustic anisotropy, twin strain, processing change layer, thin film thickness measurement, residual stress, bonding properties, and mechanical properties can be identified [8][9][10][11][12]. For a nondestructive evaluation, the acoustic velocity of the Rayleigh wave was measured by applying the V(z) curve technique of a scanning acoustic microscope.…”

Section: Introductionmentioning

confidence: 99%

Evaluation of Adhesion Properties of Thin Film Structure through Surface Acoustic Wave Dispersion Simulation

et al. 2022

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A theoretical simulation study of the dispersion characteristic of the surface acoustic wave (Rayleigh wave) was conducted by modeling the adhesion interlayer with stiffness coefficients to evaluate the bonding properties of nano-scale thin film structures. For experimental validation, a set of thin film specimens were fabricated—637 nm, 628 nm, 637 nm, 600 nm, and 600 nm thick titanium (Ti) films were deposited on silicon (Si) (100) substrate using a DC Magnetron sputtering process with DC power from 28.8 W, 57.6 W, 86.4 W, 115.2 W, and 144 W. The thicknesses of the Ti films were measured using a scanning electron microscope (SEM). Surface acoustic wave velocity for each of the manufactured thin film specimens was measured by using a V(z) curve technique of a Scanning Acoustic Microscope. The measured velocity, transducer frequency, and thickness of the film were applied to dispersion characteristic simulation for a given stiffness coefficient to calculate adhesion strength of each specimen. To verify the simulation result, the adhesion force of each specimen was measured using a nano-scratch test and then compared with the calculated values from the dispersion characteristic simulation. The value of adhesion strength from the dispersion characteristic simulation and the value of adhesion force of the nano-scratch test were found to have a similar tendency according to the process variable of the thin film. The results demonstrated that the adhesion strength of a thin film could be evaluated quantitatively by calculating the dispersion characteristics with the adhesion interlayer stiffness model.

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Section: Introductionmentioning

confidence: 99%

Evaluation of Adhesion Properties of Thin Film Structure through Surface Acoustic Wave Dispersion Simulation

et al. 2022

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“…[11]. The transfer matrix by Thomson and Haskel is a widely used method in many publications [12][13][14][15] for studying adhesion. For a given stiffness K α , such that α = n and α = t for normal and tangential stiffness respectively, the stresses and displacements are given as:…”

Section: Introductionmentioning

confidence: 99%

Characterization of Adhesion by Rayleigh Modes Generated and Detected by Lasers

Baher,

Chrifi Alaoui,

Jenot

et al. 2022

Proceedings of the 10th Convention of the European Acoustics Association Forum Acusticum 2023

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Adhesion is the ability of dissimilar particles to clutch together and is used to describe the contact between two interfaces. It is often considered as the predominant factor for coating reliability in thin-film technologies. Many techniques have been established to estimate the coating-substrate adhesion intensity. In this work, laserultrasonics, as a non-destructive non-contact method, is implemented to identify the adhesion level on a structure composed of a polyvinyl chloride film in contact with an aluminum sample. For the generation of elastic waves, a doubled frequency Nd:YAG laser is used. Then, the normal displacement at the surface of the substrate is detected thanks to a heterodyne interferometer of Mach-Zehnder type. Rayleigh modes dispersion curves obtained experimentally are compared to the theoretical ones, which are analytically obtained in order to evaluate the adhesion level as an inverse problem. Moreover, the finite element method is exploited to model the propagation of the surface acoustic waves on the studied sample. Indeed, it is necessary to predict the phenomena that could happen while characterizing a layer on a substrate structure. Finally, this allows to analyze the matching between experimental and numerical results while applying different degrees of adhesion.

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Characterization of electro-adhesion using surface waves generated and detected by Laser-Ultrasonics

Baher,

Chrifi Alaoui,

Jenot

et al. 2024

NDT & E International

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Influence of the laser source position on the generation of Rayleigh modes in a layer–substrate structure with varying degrees of adhesion

Cited by 3 publications

References 18 publications

Evaluation of Adhesion Properties of Thin Film Structure through Surface Acoustic Wave Dispersion Simulation

Evaluation of Adhesion Properties of Thin Film Structure through Surface Acoustic Wave Dispersion Simulation

Characterization of Adhesion by Rayleigh Modes Generated and Detected by Lasers

Characterization of electro-adhesion using surface waves generated and detected by Laser-Ultrasonics

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