“…The falloff in thickness in the penumbra region depends on the relative dimensions of d, D, h, and H. The arrangement is simple, but there are not enough parameters for accurate control of the variation in thickness. Although this method has been used for the manufacture of some types of GRM, it does not seem to be suitable for super-Gaussian GRM's of low order and large waist or of high order and small waist.15,' 6 Additional problems encountered during the manufacture of fully shaped GRM's with stationary mask and subtrate are mentioned in Section 4. (Fig.…”