Influence of the AlN/Pt-ratio on the electro-mechanical properties of multilayered AlN/Pt thin film strain gauges at high temperatures

Schmid, P.; Triendl, F.; Zarfl, C.; Schwarz, Sabine; Artner, Werner; Schneider, Michael; Schmid, U.

doi:10.1016/j.sna.2019.111805

Cited by 13 publications

(4 citation statements)

References 19 publications

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“…A platinum (Pt) film, which is well known for its advantages of high melting point, excellent chemical stability, and low interference of surface thermal and aerodynamic performance, − has been widely used in the fabrication of sensors including temperature, heat flow, strain and other sensors. − In recent years, with the increasing demands of automation and intelligent manufacturing in key equipment, how to integrate sensors into components efficiently and nondestructively has become more and more important, particularly in the application of high-temperature components in the aerospace industry.…”

Section: Introductionmentioning

confidence: 99%

Studies on the Platinum Thick Film Sensor Conformally Written by Laser Micro-Cladding: Formability, Microstructure, and Performance

Wang

Ouyang

et al. 2023

ACS Appl. Mater. Interfaces

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In this paper, laser micro-cladding technology (LMC) was conducted to prepare high-temperature Pt thick film sensors in situ. The formability, microstructure, sintering mechanism, and electrical properties of the LMCed Pt thick films were first studied systematically. Results indicated that with the increase of laser power density, the sintering degree of the Pt thick film increased obviously, improving its adhesion strength and reducing its resistivity. However, when the laser power density exceeded the threshold, holes or grooves were formed in the Pt film, leading to the degeneration of its properties. A Pt thick film with good adhesion strength, excellent conductive networks, and the minimum resistivity (46 ± 2 μΩ•cm) was obtained at a laser power density of 1.37 × 10 6 W•cm −2 . Then, Pt thick film temperature sensors (including Pt thermal resistance temperature (RTD) and Pt−Pt10%Rh thermocouple sensors) were conformally prepared by LMC. Their temperature-sensing performance became stable after the initial high-temperature calibration, with a linearity of 0.9985 for the RTD with a TCR of 2.46 × 10 −3 /°C (at 920 °C) and a linearity of 0.9905 for the thermocouple with a Seebeck coefficient of 9.7 μV/°C, both of which are better than that made by direct DC magnetron sputtering deposition. Therefore, this work provides a novel feasible way to conformally integrate high-performance Pt film sensors in situ.

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Section: Introductionmentioning

confidence: 99%

Studies on the Platinum Thick Film Sensor Conformally Written by Laser Micro-Cladding: Formability, Microstructure, and Performance

Wang

Ouyang

et al. 2023

ACS Appl. Mater. Interfaces

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“…Recently, various electro-acoustic devices based on aluminum nitride thin film technology have also been proposed for frequency control and sensing applications at high temperature [ 10 , 11 , 12 , 13 , 14 , 15 , 16 , 17 ]. Some of these devices are based on bulk acoustic waves (BAW), following either thin-film bulk acoustic resonator technologies (FBAR), or solidly mounted resonator technologies (SMR) [ 18 , 19 , 20 ].…”

Section: Introductionmentioning

confidence: 99%

Contribution of Ribbon-Structured SiO2 Films to AlN-Based and AlN/Diamond-Based Lamb Wave Resonators

Moutaouekkil,

Streque,

Marbouh

et al. 2023

Sensors

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New designs based on S0 Lamb modes in AlN thin layer resonating structures coupled with the implementation of structural elements in SiO2, are theoretically analyzed by the Finite Element Method (FEM). This study compares the typical characteristics of different interdigital transducer (IDTs) configurations, involving either a continuous SiO2 cap layer, or structured SiO2 elements, showing their performance in the usual terms of electromechanical coupling coefficient (K2), phase velocity, and temperature coefficient of frequency (TCF), by varying structural parameters and boundary conditions. This paper shows how to reach temperature-compensated, high-performance resonator structures based on ribbon-structured SiO2 capping. The addition of a thin diamond layer can also improve the velocity and electromechanical coupling coefficient, while keeping zero TCF and increasing the solidity of the membranes. Beyond the increase in performance allowed by such resonator configurations, their inherent structure shows additional benefits in terms of passivation, which makes them particularly relevant for sensing applications in stern environments.

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“…However, the upper temperature limit of the Pt RTD prepared by this process is 500 °C, which seriously restricts its application in hot-end components. On the other hand, Pt films always undergo rapid agglomeration and recrystallization above 500 °C, but the preparation of adhesion layers or protective layers helps improve their thermal stability at high temperatures. − For example, Zhao et al fabricated an Al 2 O 3 /ZrBN–SiCN/Al 2 O 3 composite film with a sandwich structure by reactive magnetron sputtering, and the stability of the Pt-13% Rh/Pt film thermocouple at 1000 °C was significantly improved . In addition, featured with high melting point (2690 °C) and excellent ablation resistance, yttria-stabilized zirconia (YSZ) could be a potential addition for high-temperature protective coating .…”

Section: Introductionmentioning

confidence: 99%

Thin-Film Platinum Resistance Temperature Detector with a SiCN/Yttria-Stabilized Zirconia Protective Layer by Direct Ink Writing for High-Temperature Applications

Zeng

Chen

et al. 2022

ACS Appl. Mater. Interfaces

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In situ temperature monitoring of curved high-temperature components in extreme environments is challenging for a variety of applications in fields such as aero engines and gas turbines. Recently, extrusion-based direct ink writing (DIW) has been utilized to fabricate platinum (Pt) resistance temperature detectors (RTDs). However, the current Pt RTD prepared by DIW technology suffers from a limited temperature range and poor high-temperature stability. Here, DIW technology and yttria-stabilized zirconia (YSZ)-modified precursor ceramic film packaging have been used to build a Pt RTD with high-temperature resistance, small disturbance, and high stability. The results indicate that the protective layer formed by the liquid phase anchors the Pt particles and reduces the agglomeration and volatilization of the Pt sensitive layer at high temperature. Attributed to the SiCN/YSZ protective layer, the temperature resistance curve of the Pt RTD in the range of 50–800 °C has little deviation from the fitting curve, and the fitting correlation coefficient is above 0.9999. Interestingly, the Pt RTD also has high repeatability and stability. The high temperature resistance drift rate is only 0.05%/h after 100 h of long-term testing at 800 °C and can withstand butane flame up to ∼1300 °C without damage. Moreover, the Pt RTD can be conformally deposited on the outer ring of aerospace bearings by DIW technology and then realize on-site, nondestructive, and real-time monitoring of bearing temperature. The fabricated Pt RTD shows great potential for high-temperature applications, and the novel technology proposed provides a feasible pathway for temperature monitoring of aeroengine internal curved hot-end components.

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Influence of the AlN/Pt-ratio on the electro-mechanical properties of multilayered AlN/Pt thin film strain gauges at high temperatures

Cited by 13 publications

References 19 publications

Studies on the Platinum Thick Film Sensor Conformally Written by Laser Micro-Cladding: Formability, Microstructure, and Performance

Studies on the Platinum Thick Film Sensor Conformally Written by Laser Micro-Cladding: Formability, Microstructure, and Performance

Contribution of Ribbon-Structured SiO2 Films to AlN-Based and AlN/Diamond-Based Lamb Wave Resonators

Thin-Film Platinum Resistance Temperature Detector with a SiCN/Yttria-Stabilized Zirconia Protective Layer by Direct Ink Writing for High-Temperature Applications

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