2020
DOI: 10.1007/s10762-020-00669-3
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Influence of System Performance on Layer Thickness Determination Using Terahertz Time-Domain Spectroscopy

Abstract: The quality of coatings in industrial applications and scientific research with thicknesses in the micrometer range is an important criterion for quality management. Therefore, thickness determination devices are of high interest. Terahertz time-domain spectroscopy systems have demonstrated the capability to address thickness determination of dielectric single-and multilayer coatings on different substrates. However, due to the large range of different samples, there are different performance requirements to e… Show more

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Cited by 14 publications
(6 citation statements)
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“…Its potential is demonstrated by applying it to the measurement of sample thicknesses, where a standard deviation of 4 fs (corresponds to about 1.3 µ m on average) is achieved for measurement times below one second. The measurements are carried out for six different samples and are in good agreement with reference measurements performed using a standard time-domain spectroscopy (TDS) system [16]. 1.…”
Section: Introductionsupporting
confidence: 66%
See 1 more Smart Citation
“…Its potential is demonstrated by applying it to the measurement of sample thicknesses, where a standard deviation of 4 fs (corresponds to about 1.3 µ m on average) is achieved for measurement times below one second. The measurements are carried out for six different samples and are in good agreement with reference measurements performed using a standard time-domain spectroscopy (TDS) system [16]. 1.…”
Section: Introductionsupporting
confidence: 66%
“…With the wavelength of the terahertz radiation, the averaged ∆ϕ values for each sample can be used to calculate the additional optical path length of the terahertz radiation introduced by the sample. These values are compared to reference measurements performed with a state of the art terahertz TDS measurement system [16]. Figure 6 shows the results for all samples as a bar plot, with the reference TDS measurement results in blue and the results of the upconversion measurement in red.…”
Section: Sample Measurementsmentioning
confidence: 99%
“…A sensor detects the reflecting parts and the film thickness of the individual layers is calculated with known material parameters. For a detailed description and comparison to conventional film thickness measurement methods like magnetiv-inductive the reader is referred to Pfeiffer et al [5] and Weber et al [6,7].…”
Section: Modules 2 and 3: Path Generation And Paintingmentioning
confidence: 99%
“…In recent years, however, terahertz time-domain spectroscopy (THz-TDS) has reached a promising technology readiness level 4,5 and has been shown to reliably measure layer thicknesses down to ∼10 µm. 6 THz-TDS systems generate and detect electromagnetic pulses of (sub-)picosecond duration, with each pulse comprising frequencies from about 100 GHz to several THz. 7 Similar to echo-location technology, THz pulses reflect at material boundaries.…”
Section: Introductionmentioning
confidence: 99%