Influence of substrates on roughness of self-supporting Ni films

Gao, Fengju; Zheng, Ruiting; Cheng, Guoan; Yang, Tonghai

doi:10.1016/j.nima.2007.03.033

Cited by 4 publications

(2 citation statements)

References 19 publications

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“…In the past, sodium chloride (NaCl), a non-oxide ceramic, has been used as a cheap, bulk, sacrificial material to achieve freestanding foils of materials such as Ni [13]. Besides, it was deposited onto a suitable carrier surface using an evaporation technique [14][15][16].…”

Section: Introductionmentioning

confidence: 99%

Innovative method to produce large-area freestanding functional ceramic foils

Leighton

Jones

Lonne

et al. 2018

Journal of the European Ceramic Society

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Using thick and thin films instead of bulk functional materials presents tremendous advantages in the field of flexible electronics and component miniaturization. Here, a low-cost method to grow and release large-area, microscale thickness, freestanding, functional, ceramic foils is reported. It uses evaporation of sodium chloride to silicon wafer substrates as sacrificial layers, upon which functional lead titanate zirconate ceramic films are grown at 710°C maximum temperature to validate the method. The freestanding, functional foils are then released by dissolution of the sacrificial sodium chloride in water and have the potential to be integrated into low-thermal stability printed circuits and flexible substrates. The optimization of the sodium chloride layer surface quality and bonding strength with the underlying wafer is achieved thanks to pre-annealing treatment.

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Section: Introductionmentioning

confidence: 99%

Innovative method to produce large-area freestanding functional ceramic foils

Leighton

Jones

Lonne

et al. 2018

Journal of the European Ceramic Society

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“…Watersoluble materials, such as sodium chloride (NaCl), nickel chloride, and betaine, were used as the sacrificial layers. [14][15][16][17][18][19][20][21][22][23][24][25] The releasing process of the thin film using a water-soluble material as a sacrificial layer is considered to be safer for humans and the environment than methods using a strong acid with the exception of nickel chloride, which is a carcinogenic material. 26) Gold leaf is a self-supporting Au film; however, it is too rough and insufficiently pure to be a suitable target for laserdriven ion acceleration experiments.…”

Section: Introductionmentioning

confidence: 99%

Preparation of self-supporting Au thin films on perforated substrate by releasing from water-soluble sacrificial layer

Fujii

Yamano

et al. 2016

Jpn. J. Appl. Phys.

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A self-supporting thin film is useful as a target material for laser-driven ion acceleration experiments. In this study, 100-nm-thick sputtered gold (Au) thin films were released from substrates using water-soluble sacrificial layers, and the released films were subsequently scooped up on perforated substrates. Au thin films were deposited by DC plasma sputtering on the sacrificial layers. In the releasing test, sodium chloride (NaCl) was shown to be most suitable as a sacrificial layer for Au thin films. In addition, sputtered Au thin films with thicknesses of 50 and 150 nm were deposited onto NaCl sacrificial layers, released on water, and scooped up on perforated substrates. Self-supporting Au thin films were obtained for all film thicknesses, but wrinkles and cracks appeared in the 50 nm film.

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Targets for Particle Accelerators

Lommel

Kindler

2009

Digital Encyclopedia of Applied Physics

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This article gives an overview of the different targets applied in particle accelerators and a short introduction to the material demands and the techniques established for the production. The main emphasis is placed not only on solid targets and strategies to increase their lifetime but also liquid and internal targets are touched. Special production processes for highly enriched isotopes are discussed. Finally, characterization in the sense of thickness, purity, and homogeneity is an important issue. This review is meant to be an outline, so we have provided an extensive bibliography furnishing details of the original publications.

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Influence of substrates on roughness of self-supporting Ni films

Cited by 4 publications

References 19 publications

Innovative method to produce large-area freestanding functional ceramic foils

Innovative method to produce large-area freestanding functional ceramic foils

Preparation of self-supporting Au thin films on perforated substrate by releasing from water-soluble sacrificial layer

Targets for Particle Accelerators

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