Preparation of self-supporting Au thin films on perforated substrate by releasing from water-soluble sacrificial layer

Yu, Miao; Fujii, Yuma; Yamano, Masafumi; Harigai, Toru; Suda, Yoshiyuki; Takikawa, Hirofumi; Kawano, Takeshi; Nishiuchi, Mamiko; Sakaki, H.; Kondo, Kiminori

doi:10.7567/jjap.55.07le05

Cited by 6 publications

(3 citation statements)

References 29 publications

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“…In particular, Micro-Electro-Mechanical System (MEMS) techniques have been used for nanometric scale DLC films fabrication [70]. For metallic sub-micrometric substrates production, Direct Current Magnetron Sputtering (DCMS) deposition on a sacrificial layer has been exploited [71].…”

Section: Solid Films Production For Advanced Dltsmentioning

confidence: 99%

Advanced laser-driven ion sources and their applications in materials and nuclear science

Passoni

Arioli

Cialfi

et al. 2019

Plasma Phys. Control. Fusion

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The investigation of superintense laser-driven ion sources and their potential applications offers unique opportunities for multidisciplinary research. Plasma physics can be combined with materials and nuclear science, radiation detection and advanced laser technology, leading to novel research challenges of great fundamental and applicative interest. In this paper we present interesting and comprehensive results on nanostructured low density (near-critical) foam targets for TW and PW-class lasers, obtained in the framework of the European Research Council ENSURE project. Numerical simulations and experimental activities carried out at 100 s TW and PW-class laser facilities have shown that targets consisting of a solid foil coated with a nanostructured low-density (near-critical) foam can lead to an enhancement of the ion acceleration process. This stimulated a thorough numerical investigation of superintense laser-interaction with nanostructured near-critical plasmas. Thanks to a deep understanding of the foam growth process via the pulsed laser deposition technique and to the complementary capabilities of high-power impulse magnetron sputtering, advanced multi-layer targets based on near-critical films with carefully controlled properties (e.g. density gradients over few microns length scales) can now be manufactured, with applications outreaching the field of laser-driven ion acceleration. Additionally, comprehensive numerical and theoretical work has allowed the design of dedicated experiments and a realistic table-top apparatus for laser-driven materials irradiation, ion beam analysis and neutron generation, that exploit a double-layer target to reduce the requirements for the laser system.

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Section: Solid Films Production For Advanced Dltsmentioning

confidence: 99%

Advanced laser-driven ion sources and their applications in materials and nuclear science

Passoni

Arioli

Cialfi

et al. 2019

Plasma Phys. Control. Fusion

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“…By depositing a ceramic film on a water-soluble sacrificial buffering layer of sodium chloride (NaCl), freestanding ceramic films can be produced in various geometries and thicknesses without the need for thermal treatment. NaCl is established in thick and thin film technology as a suitable sacrificial material, [36] and it has been reported as a substrate for pulsed-laser-deposition albeit with the limitation of heat treatment, [37] selfsupporting Au thin films, [38] a nanogap former, [39] and as a high-temperature sacrificial substrate [40]. In the field of aerosol deposition, NaCl has been used to reveal the film substrate interface [41] and as a sacrificial material for nanostructuring polymer surfaces [42].…”

Section: Graphical Abstract Introductionmentioning

confidence: 99%

Room temperature deposition of freestanding BaTiO3 films: temperature-induced irreversible structural and chemical relaxation

et al. 2022

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The room temperature aerosol deposition method is especially promising for the rapid deposition of ceramic thick films, making it interesting for functional components in energy, mobility, and telecommunications applications. Despite this, a number of challenges remain, such as an enhanced electrical conductivity and internal residual stresses in as-deposited films. In this work, a novel technique that integrates a sacrificial water-soluble buffer layer was used to fabricate freestanding ceramic thick films, which allows for direct observation of the film without influence of the substrate or prior thermal treatment. Here, the temperature-dependent chemical and structural relaxation phenomena in freestanding BaTiO3 films were directly investigated by characterizing the thermal expansion properties and temperature-dependent crystal structure as a function of oxygen partial pressure, where a clear nonlinear, hysteretic contraction was observed during heating, which is understood to be influenced by lattice defects. As such, aliovalent doping and atmosphere-dependent annealing experiments were used to demonstrate the influence of local chemical redistribution and oxygen vacancies on the thermal expansion, leading to insight into the origin of the high room temperature conductivity of as-deposited films as well as greater insight into the influence of the induced chemical, structural, and microstructural changes in room temperature deposited functional ceramic thick films. Graphical abstract

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“…47 Some imprint-type techniques rely on a sacrificial material as a carrier from which the desired structures are removed after processing or this layer may provide structure to a specific geometric design during fabrication. [48][49][50] The addition of a sacrificial aluminum layer prior to FIB milling has been demonstrated to improve the resolution and edge smoothness in a process called metal-assisted FIB. 51 Here, the sacrificial metal layer works to protect the working material from ion-induced damage and redeposition of milled working material.…”

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confidence: 99%

Fabrication and analysis of metallic nanoslit structures: advancements in the nanomasking method

Bauman

Darweesh

Debu

et al. 2018

J. Micro/Nanolith. MEMS MOEMS

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, "Fabrication and analysis of metallic nanoslit structures: advancements in the nanomasking method," J. Micro/Nanolith. MEMS MOEMS 17(1), 013501 (2018), doi: 10.1117/1.JMM.17.1.013501. Abstract. This work advances the fabrication capabilities of a two-step lithography technique known as nanomasking for patterning metallic nanoslit (nanogap) structures with sub-10-nm resolution, below the limit of the lithography tools used during the process. Control over structure and slit geometry is a key component of the reported method, exhibiting the control of lithographic methods while adding the potential for mass-production scale patterning speed during the secondary step of the process. The unique process allows for fabrication of interesting geometric combinations such as dual-width gratings that are otherwise difficult to create with the nanoscale resolution required for applications, such as nanoscale optics (plasmonics) and electronics. The method is advanced by introducing a bimetallic fabrication design concept and by demonstrating blanket nanomasking. Here, the need for the secondary lithography step is eliminated improving the mass-production capabilities of the technique. Analysis of the gap width and edge roughness is reported, with the average slit width measured at 7.4 AE 2.2 nm. It was found that while no long-range correlation exists between the roughness of either gap edge, and there are ranges in the order of tens of nanometers over which the slit edge roughness is correlated or anticorrelated across the gap. This work helps quantify the nanomasking process, which aids in future fabrications and leads toward the development of more accurate computational models for the optical and electrical properties of fabricated devices. © The Authors. Published by SPIE under a Creative Commons Attribution 3.0 UnportedLicense. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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Preparation of self-supporting Au thin films on perforated substrate by releasing from water-soluble sacrificial layer

Cited by 6 publications

References 29 publications

Advanced laser-driven ion sources and their applications in materials and nuclear science

Advanced laser-driven ion sources and their applications in materials and nuclear science

Room temperature deposition of freestanding BaTiO3 films: temperature-induced irreversible structural and chemical relaxation

Fabrication and analysis of metallic nanoslit structures: advancements in the nanomasking method

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