Influence of sputtering conditions on ionic conductivity of LiPON thin films

Lithium anode for lithium-air secondary batteries

“…Almost same conductivities were obtained for the LiPON films with different thickness. These conductivity and activation energy for conduction are comparable with those previously reported [13].…”

Synthesis and characterization of single- and co-doped SnO2 thin films for optoelectronic applications

“…This is due to the higher density of the corresponding AZTO target: 6.42 g/cm 3 instead of 3.79 g/cm 3 for ATO target (Table 1). Indeed, this result is in full agreement with literature indicating that target density has a drastic effect on the deposition rate [22] even if it is always suitable to have a dense target.…”

Influence of radio frequency power on structure and ionic conductivity of LiPON thin films

“…As usually observed, it can be found that the deposition rate of LiPON thin films increases with rf power. According to Hamon et al (2006), the N/P ratio decreases when rf power increases, but an opposite behaviour is observed in our research. Under the same rf power domain as in our study, the N/P ratio increases with rf power, which increases from 0⋅31 to 0⋅75.…”