2014
DOI: 10.1016/j.vacuum.2014.04.013
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Influence of sputtering atmosphere on the structural and magnetic properties of (Bi1−xNdx)FeO3 thin films

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Cited by 4 publications
(2 citation statements)
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“…The single-layered Ba 0.65 Sr 0.35 TiO 3 (BST), Bi 0.875 Nd 0.125 FeO 3 (BNF), and trilayered BST(50 nm)/BNF(50 nm)/BST(50 nm) thin films grown on Pt(111)/Ti/SiO 2 /Si(100) substrates using radio frequency magnetron sputtering with ceramic targets of BNF and BST [28,29]. When BST and BNF thin films sputter, the maintenance of 500 • C is the ideal substrate temperature, and Ar/O 2 (pressure ratio 9:1) and nitrogen are the ideal deposition atmosphere, respectively [30]. We annealed the samples at 650 • C by use of a rapid thermal annealing (RTA) furnace.…”
Section: Methodsmentioning
confidence: 99%
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“…The single-layered Ba 0.65 Sr 0.35 TiO 3 (BST), Bi 0.875 Nd 0.125 FeO 3 (BNF), and trilayered BST(50 nm)/BNF(50 nm)/BST(50 nm) thin films grown on Pt(111)/Ti/SiO 2 /Si(100) substrates using radio frequency magnetron sputtering with ceramic targets of BNF and BST [28,29]. When BST and BNF thin films sputter, the maintenance of 500 • C is the ideal substrate temperature, and Ar/O 2 (pressure ratio 9:1) and nitrogen are the ideal deposition atmosphere, respectively [30]. We annealed the samples at 650 • C by use of a rapid thermal annealing (RTA) furnace.…”
Section: Methodsmentioning
confidence: 99%
“…The BST and BST/BNF/BST thin films display polycrystalline structure and without any secondary phases. Typically, the BNF film is annealed in an oxygen atmosphere and a second phase appears [30]. The crystal structure of the BNF thin films can be controlled by using BST buffer-layer and annealing atmosphere.…”
Section: Methodsmentioning
confidence: 99%