Influence of packaging atmospheres on the durability of high-temperature SAW sensors

Bardong, Jochen; Bruckner, Gudrun; Kraft, Martin; Fachberger, R.

doi:10.1109/ultsym.2009.5441557

Cited by 22 publications

(21 citation statements)

References 4 publications

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“…They reach a depth of more than 1 μm. This finding resembles the formation of voids near the LGS substrate surface of a SAW device in uncovered areas between the finger electrodes after a heat treatment at 650

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C in light vacuum (0.4 mbar) observed by Bardong, et al [10]. …”

Section: Resultssupporting

confidence: 84%

“…Bardong, et al investigated the influence of packaging atmospheres on the durability of high-temperature SAW sensors using LGS substrates among others [ 10 ]. They found no color change of the substrate during heating under air atmosphere, an effect which occurs during heating in vacuum, but in both cases there was a degradation of the crystal surface.…”

Section: Introductionmentioning

confidence: 99%

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Surface Effects and Challenges for Application of Piezoelectric Langasite Substrates in Surface Acoustic Wave Devices Caused by High Temperature Annealing under High Vacuum

et al. 2015

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Substrate materials that are high-temperature stable are essential for sensor devices which are applied at high temperatures. Although langasite is suggested as such a material, severe O and Ga diffusion into an O-affine deposited film was observed during annealing at high temperatures under vacuum conditions, leading to a damage of the metallization as well as a change of the properties of the substrate and finally to a failure of the device. Therefore, annealing of bare LGS (La3Ga5SiO14) substrates at 800 ∘C under high vacuum conditions is performed to analyze whether this pretreatment improves the suitability and stability of this material for high temperature applications in vacuum. To reveal the influence of the pretreatment on the subsequently deposited metallization, RuAl thin films are used as they are known to oxidize on LGS at high temperatures. A local study of the pretreated and metallized substrates using transmission electron microscopy reveals strong modification of the substrate surface. Micro cracks are visible. The composition of the substrate is strongly altered at those regions. Severe challenges for the application of LGS substrates under high-temperature vacuum conditions arise from these substrate damages, revealing that the pretreatment does not improve the applicability.

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^{\circ}

C in light vacuum (0.4 mbar) observed by Bardong, et al [10]. …”

Section: Resultssupporting

confidence: 84%

Section: Introductionmentioning

confidence: 99%

Surface Effects and Challenges for Application of Piezoelectric Langasite Substrates in Surface Acoustic Wave Devices Caused by High Temperature Annealing under High Vacuum

et al. 2015

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show abstract

“…As described by Bardon et al annealing under vacuum conditions at 650 C leads to losses of the LGS crystal of O 2 and Ga 2 O 3 [10]. Since LGS has a higher Ga content, with the loss in Ga a higher oxygen diffusion can be expected as compared to annealing of CTGS.…”

Section: Discussionmentioning

confidence: 91%

“…The stabilization of Ga in the single crystal at high temperatures is critically dependent on the atmosphere in which the crystal is heated [1,10]. It has been reported that annealing under vacuum leads to an accelerated diffusion of Ga out from the substrate [1].…”

Section: Discussionmentioning

confidence: 99%

TEM studies on the changes of the composition in LGS and CTGS substrates covered with a RuAl metallization and on the phase formation within the RuAl film after heat treatment at 600 and 800 °C

Seifert

Rane

Menzel

et al. 2016

Journal of Alloys and Compounds

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“…inert gas or vacuum). The crucial role of the atmosphere inside packages used for hightemperature SAW devices is described in detail in [13]. To minimize the mechanical stress for a sealed package, the same type of ceramic as used for the cavity package was selected as lid material (see figure 11).…”

Section: Fig 10 Schematics Of Stress-reduced Design For One-port Rementioning

confidence: 99%

C3.3 - A 600°C Wireless and Passive Temperature Sensor Based on Langasite SAW-Resonators

Wall¹,

Gruenwald²,

Klein³

et al. 2015

Proceedings SENSOR 2015

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Influence of packaging atmospheres on the durability of high-temperature SAW sensors

Cited by 22 publications

References 4 publications

Surface Effects and Challenges for Application of Piezoelectric Langasite Substrates in Surface Acoustic Wave Devices Caused by High Temperature Annealing under High Vacuum

Surface Effects and Challenges for Application of Piezoelectric Langasite Substrates in Surface Acoustic Wave Devices Caused by High Temperature Annealing under High Vacuum

TEM studies on the changes of the composition in LGS and CTGS substrates covered with a RuAl metallization and on the phase formation within the RuAl film after heat treatment at 600 and 800 °C

C3.3 - A 600°C Wireless and Passive Temperature Sensor Based on Langasite SAW-Resonators

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