Influence of optical probe packaging on a 3D MEMS scanning micro-mirror for optical coherence tomography (OCT) applications

Premachandran, C.S.; Khairyanto, Ahmad; Chen, K.; Singh, Jasveer; Wang, Sandy Xl; Xu, Yi; Chen, Nanguang; Sheppard, Colin J. R.; Olivo, Malini; Lau, John H.

doi:10.1109/ectc.2008.4550072

Cited by 7 publications

(3 citation statements)

References 11 publications

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“…To enhance the image quality a 10cc saline flush was performed through the guiding catheter for 2 s while using in the coronary arteries [44]. The hand held probes are also being used for clinical retinal imaging in infants and children in combination with FD-OCT [45][46][47][48].…”

Section: Hand Held Optical Probementioning

confidence: 99%

“…These precisely polished based on MEMS technology are fabricated with a process integration by leveraging the sophisticated photolithographic tool sets from the IC industry [76]. These micromirrors have been exclusively designed after developing a silicon optical bench the light is being focused with a GRIN lens and have been used in a TD-OCT to plant tissues [47,[77][78][79]. P.E.…”

Section: Mems Based Probesmentioning

confidence: 99%

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Catheters for optical coherence tomography

2011

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The objective of this review article is to overview technology, clinical evidence, and future applications to date optical coherence tomography (OCT) probes to yield the diagnostic purpose. We have reviewed the designing, construction and working of different categories of OCT probes developed for optical diagnostics having a potential for non invasive and improved detection of different types of cancer as well as other neoplasm. Rotational and balloon catheters, imaging needles and hand-held, linear scanning, multichannel, micro electro mechanical systems (MEMS) technology based, dynamic focusing, forward view imaging, and common path interferometer based probes have been discussed in details. The fiber probes have shown excellent performance for two dimensional and three dimensional higher resolution, cross-sectional imaging of interior and exterior body tissues that can be compared with histopathology to provide the information about the angiogenesis and other lesions in the tissue. The MEMS-technology based probes are found to be more suitable for three dimensional morphological imaging.Assembled micro electro mechanical systems (MEMS) probe

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Section: Hand Held Optical Probementioning

confidence: 99%

Section: Mems Based Probesmentioning

confidence: 99%

Catheters for optical coherence tomography

2011

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“…The SiOB assembly consisted of a pair of silicon substrates, an upper substrate and a lower substrate, with assembly slots for the SMF, the GRIN lens and the micromirror. The package provided initial self-assembly where one component alignment made others to be aligned as well [32,33]. The fabrication process for the lower substrate of SiOB is shown in figure 6(A) and the assembly process is illustrated in figure 6(B).…”

Section: Probe Design and Siob Assemblymentioning

confidence: 99%

Design and development of a 3D scanning MEMS OCT probe using a novel SiOB package assembly

Xu¹,

Singh²,

Premachandran³

et al. 2008

J. Micromech. Microeng.

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A MEMS optical coherence tomography (OCT) probe prototype was developed using a unique assembly based on silicon optical bench (SiOB) methodology. The probe is formed by integrating a three-dimensional (3D) scanning micromirror, gradient refractive index (GRIN) lens and optical fiber on SiOB substrates having prefabricated self-aligned slots. The two-axis scanning micromirror is based on electrothermal actuation with required voltage less than 2 V for mechanical deflections up to 17°. The optical probe was enclosed within a biocompatible, transparent and waterproof polycarbonate tube with a view of in vivo diagnostic applications. The diameter of the miniature probe is less than 4 mm and the length of its rigid part is about 25 mm. The probe engineering and proof of concept of the probe were demonstrated by obtaining en face and three-dimensional OCT images of an IR card used as a standard sample.

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