Design and development of a 3D scanning MEMS OCT probe using a novel SiOB package assembly

Xu, Yi; Singh, Jasveer; Premachandran, C.S.; Khairyanto, Ahmad; Chen, K W S; Chen, N; Sheppard, Colin J. R.; Olivo, Malini

doi:10.1088/0960-1317/18/12/125005

Cited by 52 publications

(40 citation statements)

References 38 publications

(42 reference statements)

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“…Although most OCT systems use 2-axis galvanometric scanning systems to raster the sample (and this is the configuration that we have simulated and tested experimentally), an alternative to minimize fan distortion can be the use of scanning systems that do not show a separation between mirrors (i.e., microelectromechanical systems technology [25,26]). In this case, the magnitude of fan distortion will depend only on the spherical aberration of the focusing/collimating lens and its alignment, and our proposed model and algorithm will still be applicable to predict and compensate distortion.…”

Section: Discussionmentioning

confidence: 99%

Optical coherence tomography for quantitative surface topography

et al. 2009

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We address the measurement and correction of fan distortion in optical coherence tomography (OCT). This effect arises from the scanning system configuration and prevents one, in general, from obtaining quantitative topographic data from OCT. Computer simulations allowed us to quantify the effect and evaluate its dependence on the scanning mirror separation and design of the collimating lens, as well as to estimate the optimal axial position of that lens to minimize the fan distortion. We also developed a numerical algorithm based on 3-D ray propagation for the correction of the residual fan distortion. The effect was studied experimentally using a custom developed time-domain OCT in a Michelson configuration provided with a confocal channel, and the accuracy of the fan distortion correction algorithm tested on samples of known dimensions (flat surfaces and spherical lenses). With a proper calibration of the system with use of an onfocal channel, this algorithm makes it possible for time-domain OCT devices to be used as topographers.

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Section: Discussionmentioning

confidence: 99%

Optical coherence tomography for quantitative surface topography

et al. 2009

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“…Another popular side-viewing probe design was demonstrated by Xu et al [20], employing a SiOB with a pre-fabricated trench to hold a micromirror vertically. The micromirror was dropped into the trench and fixed manually, and the electrical connections between the MEMS actuators and the embedded metal paths on the SiOB were provided with solder balls [20].…”

Section: Introductionmentioning

confidence: 99%

“…The micromirror was dropped into the trench and fixed manually, and the electrical connections between the MEMS actuators and the embedded metal paths on the SiOB were provided with solder balls [20]. But to form reliable electrical and mechanical connections is still a challenge due to significant deformation of the solder balls during reflow and curing.…”

Section: Introductionmentioning

confidence: 99%

Optical coherence tomography endoscopic probe based on a tilted MEMS mirror

Duan¹,

Tanguy²,

Pozzi³

et al. 2016

Biomed. Opt. Express

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This paper reports a compact microendoscopic OCT probe with an outer diameter of only 2.7 mm. The small diameter is enabled by a novel 2-axis scanning MEMS mirror with a preset 45° tilted angle. The tilted MEMS mirror is directly integrated on a silicon optical bench (SiOB). The SiOB provides mechanical support and electrical wiring to the mirror plate via a set of bimorph flexure, enabling a compact probe mount design without the requirement of a 45° slope, which is capable to dramatically reduce the probe size and ease the assembly process. Additionally, the SiOB also provides trenches with properly-designed opening widths for automatic alignment of the MEMS mirror, GRIN lens and optical fiber. The 45°-tilted MEMS mirror plate is actuated by four electrothermal bimorph actuators. The packaged 2.7 mm-diameter probe offers 2-axis side-view optical scanning with a large optical scan range of 40° at a low drive voltage of 5.5 Vdc in both axes, allowing a lateral scan area of 2.2 mm × 2.2 mm at a 3 mm working distance. High-resolution 2D and 3D OCT images of the IR card, ex vivo imaging of meniscus specimens and rat brain slices, in vivo imaging of the human finger and nail have been obtained with a TDOCT system.

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“…The use of rotating components within the endoscope tip provides imaging over an arc centred on the probe, which is particularly suitable for looking at the internal surfaces of cylindrical samples 3 . Implementations involving miniature scanners or MEMS devices have also been demonstrated, which commonly address a rectangular region of the sample surface 4 . A coherent imaging fibre bundle is an ordered arrangement of small-diameter fibre cores, each of which occupies the same relative position in the surrounding matrix at either end of the bundle.…”

Section: Introductionmentioning

confidence: 99%

Swept-source OCT with coherent imaging fibre bundles

Ford

Tatam

2009

SPIE Proceedings

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OCT probes for endoscopy typically use a single optical fibre to deliver light to the measurement region. 2D imaging is achieved using mechanical scanning components at the probe tip. We are investigating an OCT system in which fibre imaging bundles replace the single probe fibre, allowing many thousand measurement points to be addressed without any mechanical scanning at the probe tip, over a region measuring a few millimetres in each dimension. This allows a small-diameter, electrically passive probe to be engineered using offthe-shelf scanning optics. Images from a single-fibre, conventionally-scanned probe and from a bundle-based probe are presented, using swept-source processing centred at 1330 nm.

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Design and development of a 3D scanning MEMS OCT probe using a novel SiOB package assembly

Cited by 52 publications

References 38 publications

Optical coherence tomography for quantitative surface topography

Optical coherence tomography for quantitative surface topography

Optical coherence tomography endoscopic probe based on a tilted MEMS mirror

Swept-source OCT with coherent imaging fibre bundles

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