2010
DOI: 10.1016/j.elspec.2010.01.002
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Influence of multiple elastic scattering on the shape of the elastically scattered electron peak

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Cited by 13 publications
(5 citation statements)
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“…As pointed out already in Ref. 26, another small source of additional broadening that could have some effect is due to different isotopes. About 1% of carbon is 13 C, which has, under our scattering conditions, a recoil energy of 5.99 eV rather than 6.49 eV which applies to 12 C. The kinetic energy of 13 C atoms is √ 12/13 of that of 12 C atoms 7 and, using Eq.…”
Section: B Corrections Due To the Presence Of Different Isotopesmentioning
confidence: 71%
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“…As pointed out already in Ref. 26, another small source of additional broadening that could have some effect is due to different isotopes. About 1% of carbon is 13 C, which has, under our scattering conditions, a recoil energy of 5.99 eV rather than 6.49 eV which applies to 12 C. The kinetic energy of 13 C atoms is √ 12/13 of that of 12 C atoms 7 and, using Eq.…”
Section: B Corrections Due To the Presence Of Different Isotopesmentioning
confidence: 71%
“…Multiple scattering trajectories are dominated by a single large-angle and one (or more) small-angle scattering events. 26,30 The contribution to the recoil energy of the latter are very small. Thus, the peak shapes of single and multiple scattered electrons are very similar.…”
Section: A Corrections Due To Multiple Scatteringmentioning
confidence: 98%
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“…Interpretation of spectrums of elastic backscattering electrons was detailed discussed in different papers [9][10] backscattering of electrons (quasi-single approximation, discussed in [9]) can be used. In this case it is useful to come to following variables (from optics).…”
Section: Erbs For Depth Profilingmentioning
confidence: 99%
“…Fitting of the spectra with a simple Gaussian or Voigt line shape is possible, but is based on a large number of fitting variables, which results in several solutions for the depth profile. The shape of the elastic peak could also be more complex because of multiple elastic scattering [20]. We can conclude, that the quantitative analysis of EPES, measured with a high energy resolution, of hydrocarbon PCVD films is not trivial and is an aim for a detailed discussion.…”
Section: Introductionmentioning
confidence: 99%