“…8,13,14 It has been demonstrated that the slow relaxation processes in BSTO structures are connected with oxygen vacancies, which commonly exist in oxide films. 7,8,13 So, it can be concluded that one way to suppress the slow relaxation process in these films is to decrease the concentration of oxygen vacancies by annealing in an oxygen atmosphere. Nowadays, a high-temperature annealing operation is often used to increase the structure quality and improve the electrical properties of FE films.…”