Influence of in-situ and postannealing technique on tribological performance of NiTi SMA thin films

Tillmann, Wolfgang; Momeni, Soroush

doi:10.1016/j.surfcoat.2015.07.012

Cited by 13 publications

(1 citation statement)

References 33 publications

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“…However, the grain size of the thin film grown at 773 K increased drastically when compared with those observed at lower substrate temperatures. This drastic increase in the grain size at a specific temperature occurred because the energy of the sputtered atoms exceeded the activation energy of inter-diffusion, causing active inter-diffusion [ 27 ]. Therefore, these experiments demonstrate that the substrate temperature is the most important factor dictating the grain size.…”

Section: Resultsmentioning

confidence: 99%

Grain Size and Phase Transformation Behavior of TiNi Shape-Memory-Alloy Thin Film under Different Deposition Conditions

et al. 2020

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TiNi shape-memory-alloy thin films can be used as small high-speed actuators or sensors because they exhibit a rapid response rate. In recent years, the transformation temperature of these films, manufactured via a magnetron sputtering method, was found to be lower than that of the bulk alloys owing to the small size of the grain. In this study, deposition conditions (growth rate, film thickness, and substrate temperature) affecting the grain size of thin films were investigated. The grain size of the thin film alloys was found to be most responsive to the substrate temperature.

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Section: Resultsmentioning

confidence: 99%